JPS58104179A - Method and apparatus for refilling al evaporator - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION A method for recharging evaporates is particularly suitable for the coordinated recharging of aluminum in a continuously operating high-rate evaporator for a moving band-shaped gold-substrate stack. used for.

The known evaporator works on the principle that aluminum powder or pieces are introduced into a crucible and melted there, so that during the evaporation pause the crucible is refilled with evaporated material. . A to the evaporator while evaporation is taking place
This recharging of j results in a disturbance of the evaporation process, whether directly to the surface of the substance to be evaporated from above or through a crucible below the surface. (German Democratic Republic Patent No. 159981). This defect is due to the fact that the gas liberated in the p'l is partly liberated upon melting in vacuum and partly upon heating the mtwr product to an evaporation temperature of about 1850 °C. Live. This gas causes a pressure increase across the evaporation station. A reduction in the adhesion of the layer and a graying of the layer surface 9 are the consequences. A further, undesirable phenomenon is caused by the non-directional flow of evaporate within the evaporator crucible, constrained by the freshly melted and still relatively cold Aj. The uneven and time-varying temperature distribution of the vapor discharge surface resulting from the evaporation results in variations in the lateral and longitudinal layer thickness of the zone to be evaporated.

It is also known that the evaporation vessel is supplied with liquid evaporate through a conduit, which is melted in a furnace outside the vacuum and kept in liquid form (German Published Application No. 1193899).
Publication No. 2). The vapor is then brought below the surface of the evaporator.

This method has the disadvantage that the melted material in the furnace vessel is not completely degassed, so that it reaches the evaporation vessel and the gases evolved from the melt cause the disturbances already mentioned. .

It is an object of the present invention to convert evaporates, in particular At, into an evaporator melt in such a way as to eliminate the above-mentioned drawbacks and to enable wide (>500119) band evaporation operating in continuous operation. YK will supply additional supplies.

A/The problem is to create a method for the additional supply of evaporators and an apparatus for carrying out this method.
... 3 degrees, 7 degrees, caused a slight gas generation of #1, the temperature distribution on the surface of the evaporated material did not change at all, and the amount of gas was not changed. additional supply is possible.

The evaporation process is not influenced by additional feeds or by the oxide layer generated.

According to the present invention, the problem is that At can be produced using an electron beam in a separate crucible in vacuum outside the evaporation station? #
After being liquefied and only heated to about 1000 K, the pure liquid muj is led from the crucible through a cascade device into the evaporator crucible in the evaporation station, where the entire process is carried out in a vacuum. This is solved by For economical reasons, the evaporate is supplied as sea cucumber pig iron, which is thoroughly purified by an electron beam and dripped into the crucible.

The molten pool is likewise irradiated by an electron beam. During this solubilization process, a specially controlled electron beam is used for heating Aj and for metering the effluent to the cascade device. The control is based on the residence time of the electron beam on the sea cucumber iron crucible, corresponding to the performance required for melting and heating.
It is done by the method of being J. The electron beam changes between the sea cucumber pig iron and the Yarutsuba in several tens of milliseconds. However, for periods whose length is in the range of a few seconds, the electron beam is focused at the crucible outlet. This is this i! This causes local overheating of Aj and Muzoos in the area, so even if the eye circle is slightly exceeded by #eclipse, the oxidized layer will be broken and liquid At will protrude. At that time, a small amount of A leaked out.
The amount of j is such that Aj in the cascade device is completely degassed based on the proper vacuum surface ratio.

Control of the dispensed amount of 1 hot water and 0 is performed by controlling the electron beam. The induced precipitation part of kisss does not interfere with the evaporation process. In this form of material supply, there is still a large amount of sialumium melted during melting, followed by the gasification of the remainder of the sialumium melt in a so-called "aluminum bubble" in order to prevent Aj blowouts and pressure build-up in the connected evaporation station. A420a is loaded into the device. This oxide is deposited on the surface of the weld pool. Heating the molten pool to only 1000 min does not destroy this layer. It already exists at this temperature
It has the advantage that the evaporation of water is reduced to a non-hazardous value.

The device iit for carrying out this method consists of a single nitrous trough, into which a sea cucumber-shaped At is inserted through a gate.
will be introduced. This vacuum chamber, called the premmM chamber, has a swingable melt and is arranged so that the molten substance can be extracted. An outflow port is attached to the rutsuho.

In the preliminary melting chamber V, a cannon is placed so that the electron beam can irradiate the evaporated material, the molten pool, and the outlet, and a conduit is installed at a distance below the outlet. , (cascade), which is cut off in such a way that the outflowing evaporates have to advance over a short distance, arbitrarily falling. The last conduit has the same distance to the evaporator crucible and is adjustable. Because the height of the evaporator crucible is M! Because you can. Any lower i! in the whole cascade device! Ili degree is 0i even if it's evening each time
It reaches 11ak'. It is suitable that the pre-melting chamber and the evaporation station are connected in a full-scale manner, and that both are uncoupled in a full-scale manner. In this case, the conduit in the region of the valve is designed to be movable.

More guide 1! j'ia is heat resistant, releases little gas in vacuum, and is suitable for A/resistance materials, especially carbides (etc.
c) is appropriate.

There is a melter 2 in the pre-melting chamber 1, in which p-1 sea cucumber lead 3 is melted by an electron beam 5 produced by an electron gunboat. Electronic beam, Mu5iiAl Sukko 3, Rusuha 2
The second one irradiates the flow mill opening 6. There are two companies that are in love with each other. During the tilting of the tube I":2, the liquid liquid flows through the outlet 6 into the insulated conduit 1, and from there through the horizontal tube 8 into the also inclined N# conduit, where it flows from there. Next, it reaches the evaporator crucible 10, and the steaming!
It is located at the next evaporation station. The milk, liquid Aj in the cascade type conduit device, drops part of the arbitrary falling section Kl. By doing so, one bubble of Aj and the resulting degassing of the remaining residual gas are carried out.

If the valve is in the same position as 1' for disconnection of the vacuum in the vacuum section, then the conduit valve is set so that it can be moved. Since the evaporator 10 can move ill!l its height, the conduit 9 is firmly fixed to this, so that the evaporator crucible 10 can be moved from the conduit 9 to the evaporator crucible 10.
The height of fall to is constant.

In order to thereby avoid that the fall height between the conduits 7 and 9 is too pronounced for unsuitable insects, the conduit 8 is arranged between them, so that an auxiliary cascade occurs.

The electron beam 5 for melting and heating the mu t is periodically deflected for several seconds aFMj to focus on the outlet 6 of the melt #X2, resulting in local heating of Aj and mu zoos in this region.

[Brief explanation of the drawing]

11 is a sectional view of the pre-melting chamber, and 2- is a plan view of the evaporation station of the pre-melting chamber.

Claims (1)

[Claims] 1) Catalyze in a vacuum with an At1r capsulated electron beam, heat Ruri to about 1000x inside, and place it with an electron beam from 6 units while cascading in the sky. A method for refilling an At evaporator, characterized in that the evaporated material is ms outside the evaporation station and supplied in liquid form, characterized in that the evaporator melt of the evaporation station is guided into the evaporation station via a evaporator melt. 2) The pre-melting chamber (1) is aerodynamic and has almost all stations (
11) and 1 & softened], spare #! Aj sea cucumber i & (3) introduced through the gate into lI calendar room (1)
, an analogous example (2) of irradiating the evaporated matter, the bath, and the outlet (6) is a powerful electron beam (
5] is arranged, and the T of the outlet (6) is arranged.
4m ()l) is arranged in the lower-grade section at least in l places, starting with b, in the a-nitake crucible (10) of k-suteshimin (11), and the lower-grade section is arranged, Special * ('/) and h outlet (6) and evaporator outlet (
10) are each at least 100@″5il
Device consisting of a pre-discharge connected to an evaporation station for carrying out the method according to claim 1), characterized in that c. 3) Evaporation gas f - y (11) t'? IN+l
A valve is installed between the 15M chamber (1) and conduction in this area! () J is movable, claim H2)
Based on <device. 4) The conduit (MaHa) is heat resistant, emits almost no gas in a vacuum, and is made of an alkali-based resistive material, especially silicon: A special JPF! 1lIj Search Range 82) K-based device.