JPS58100703A - 光学式スケ−ル読取装置 - Google Patents

光学式スケ−ル読取装置

Info

Publication number
JPS58100703A
JPS58100703A JP56200596A JP20059681A JPS58100703A JP S58100703 A JPS58100703 A JP S58100703A JP 56200596 A JP56200596 A JP 56200596A JP 20059681 A JP20059681 A JP 20059681A JP S58100703 A JPS58100703 A JP S58100703A
Authority
JP
Japan
Prior art keywords
light
light receiving
scale
receiving means
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56200596A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6213603B2 (en, 2012
Inventor
Hideto Iwaoka
秀人 岩岡
Koji Akiyama
浩二 秋山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP56200596A priority Critical patent/JPS58100703A/ja
Publication of JPS58100703A publication Critical patent/JPS58100703A/ja
Publication of JPS6213603B2 publication Critical patent/JPS6213603B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP56200596A 1981-12-11 1981-12-11 光学式スケ−ル読取装置 Granted JPS58100703A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56200596A JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56200596A JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Publications (2)

Publication Number Publication Date
JPS58100703A true JPS58100703A (ja) 1983-06-15
JPS6213603B2 JPS6213603B2 (en, 2012) 1987-03-27

Family

ID=16426979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56200596A Granted JPS58100703A (ja) 1981-12-11 1981-12-11 光学式スケ−ル読取装置

Country Status (1)

Country Link
JP (1) JPS58100703A (en, 2012)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433613U (en, 2012) * 1987-08-20 1989-03-02
JPH01272917A (ja) * 1988-04-25 1989-10-31 Mitsutoyo Corp 反射式ｘｙエンコーダ
JPH01291101A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｎ次元エンコーダ
JPH01291194A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｘ−ｙテーブル
US7134343B2 (en) * 2003-07-25 2006-11-14 Kabushiki Kaisha Toshiba Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound
JP2020512563A (ja) * 2017-03-31 2020-04-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 走査型プローブ顕微鏡のための装置および方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991260A (en, 2012) * 1972-12-19 1974-08-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991260A (en, 2012) * 1972-12-19 1974-08-31

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6433613U (en, 2012) * 1987-08-20 1989-03-02
JPH01272917A (ja) * 1988-04-25 1989-10-31 Mitsutoyo Corp 反射式ｘｙエンコーダ
JPH01291101A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｎ次元エンコーダ
JPH01291194A (ja) * 1988-05-18 1989-11-22 Tokyo Electron Ltd Ｘ−ｙテーブル
US7134343B2 (en) * 2003-07-25 2006-11-14 Kabushiki Kaisha Toshiba Opto-acoustoelectric device and methods for analyzing mechanical vibration and sound
JP2020512563A (ja) * 2017-03-31 2020-04-23 カール・ツァイス・エスエムティー・ゲーエムベーハー 走査型プローブ顕微鏡のための装置および方法
US11237185B2 (en) 2017-03-31 2022-02-01 Carl Zeiss Smt Gmbh Apparatus and method for a scanning probe microscope
US11796563B2 (en) 2017-03-31 2023-10-24 Carl Zeiss Smt Gmbh Apparatus and method for a scanning probe microscope

Also Published As

Publication number Publication date
JPS6213603B2 (en, 2012) 1987-03-27

Similar Documents

Publication Publication Date Title
JP2603305B2 (ja) 変位測定装置
JP2586120B2 (ja) エンコーダー
US9097511B2 (en) Displacement detecting device with a polarization change to a twice-diffracted beam
BE1007876A4 (nl) Stralingsbron-eenheid voor het opwekken van een bundel met twee polarisatierichtingen en twee frequenties.
US4955718A (en) Photoelectric measuring system with integrated optical circuit including and illuminating system
JPS60243514A (ja) 光電的測定装置
CN110716397A (zh) 激光干涉光刻中的曝光光束相位测量方法和光刻系统
JPH03148015A (ja) 位置測定装置
US4025197A (en) Novel technique for spot position measurement
JPH03115921A (ja) 信号内挿回路及び該回路を備えた変位測定装置
JP2017026566A (ja) 変位検出装置
JP2764373B2 (ja) 多座標測定装置
JPS58100703A (ja) 光学式スケ−ル読取装置
JPS58191907A (ja) 移動量測定方法
US7187451B2 (en) Apparatus for measuring two-dimensional displacement
JPS63277926A (ja) 測長装置
JPH046884B2 (en, 2012)
JP3185373B2 (ja) エンコーダ
JPS59163517A (ja) 光学式スケ−ル読取装置
JPS6128923B2 (en, 2012)
EP2955490A2 (en) Displacement detecting device
JP2008249456A (ja) 光エンコーダ
JP2675317B2 (ja) 移動量測定方法及び移動量測定装置
JPS6139290Y2 (en, 2012)
JPH03115920A (ja) 零点位置検出装置