JPS579004B2 - - Google Patents

Info

Publication number
JPS579004B2
JPS579004B2 JP12910475A JP12910475A JPS579004B2 JP S579004 B2 JPS579004 B2 JP S579004B2 JP 12910475 A JP12910475 A JP 12910475A JP 12910475 A JP12910475 A JP 12910475A JP S579004 B2 JPS579004 B2 JP S579004B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12910475A
Other languages
Japanese (ja)
Other versions
JPS5252579A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50129104A priority Critical patent/JPS5252579A/ja
Publication of JPS5252579A publication Critical patent/JPS5252579A/ja
Publication of JPS579004B2 publication Critical patent/JPS579004B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP50129104A 1975-10-27 1975-10-27 Clearance adjusng method Granted JPS5252579A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50129104A JPS5252579A (en) 1975-10-27 1975-10-27 Clearance adjusng method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129104A JPS5252579A (en) 1975-10-27 1975-10-27 Clearance adjusng method

Publications (2)

Publication Number Publication Date
JPS5252579A JPS5252579A (en) 1977-04-27
JPS579004B2 true JPS579004B2 (enrdf_load_html_response) 1982-02-19

Family

ID=15001156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129104A Granted JPS5252579A (en) 1975-10-27 1975-10-27 Clearance adjusng method

Country Status (1)

Country Link
JP (1) JPS5252579A (enrdf_load_html_response)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562630A (en) * 1979-06-22 1981-01-12 Hitachi Ltd Installing of wafer position in projection aligner
JPS6144427Y2 (enrdf_load_html_response) * 1980-05-08 1986-12-15
JPS6144428Y2 (enrdf_load_html_response) * 1980-05-08 1986-12-15
JPS6218033Y2 (enrdf_load_html_response) * 1980-06-23 1987-05-09
JPS6144429Y2 (enrdf_load_html_response) * 1980-08-13 1986-12-15
JPS57204547A (en) * 1981-06-12 1982-12-15 Hitachi Ltd Exposing method
JPS5875834A (ja) * 1981-10-30 1983-05-07 Hitachi Ltd プロキシミティ露光装置
JPS58103136A (ja) * 1981-12-16 1983-06-20 Nippon Kogaku Kk <Nikon> 基板の傾き設定装置
JPS58156937A (ja) * 1982-03-12 1983-09-19 Hitachi Ltd 露光装置
JPS58175631U (ja) * 1982-05-18 1983-11-24 株式会社東芝 平行出し装置
JPS5917247A (ja) * 1982-07-21 1984-01-28 Hitachi Ltd 露光装置
US4472824A (en) * 1982-08-04 1984-09-18 The Perkin-Elmer Corporation Apparatus for effecting alignment and spacing control of a mask and wafer for use in X-ray lithography
JPS5975625A (ja) * 1982-10-22 1984-04-28 Fujitsu Ltd 基板支持方法
JPS60100005A (ja) * 1983-11-04 1985-06-03 Canon Inc 間隔調整装置
JPS6099671A (ja) * 1983-11-04 1985-06-03 Canon Inc 熱転写記録装置
US4932781A (en) * 1983-11-04 1990-06-12 Canon Kabushiki Kaisha Gap measuring apparatus using interference fringes of reflected light
JPS60100004A (ja) * 1983-11-04 1985-06-03 Canon Inc 間隔調整装置
JPS611021A (ja) * 1985-05-13 1986-01-07 Hitachi Ltd 露光装置における位置設定方法
JPH0628222B2 (ja) * 1986-05-28 1994-04-13 株式会社日立製作所 プロキシミテイ方式の露光装置
JPH0789047B2 (ja) * 1986-08-20 1995-09-27 富士通株式会社 ウエハ・マスク間ギャップ合わせ方法
JP2017032308A (ja) * 2015-07-29 2017-02-09 三菱重工業株式会社 隙間計測装置、及び、隙間管理システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123609Y2 (enrdf_load_html_response) * 1971-04-09 1976-06-17
JPS5243692B2 (enrdf_load_html_response) * 1973-03-26 1977-11-01

Also Published As

Publication number Publication date
JPS5252579A (en) 1977-04-27

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