JPS5786747A - Measuring method for humidity and dew condensation - Google Patents
Measuring method for humidity and dew condensationInfo
- Publication number
- JPS5786747A JPS5786747A JP16385480A JP16385480A JPS5786747A JP S5786747 A JPS5786747 A JP S5786747A JP 16385480 A JP16385480 A JP 16385480A JP 16385480 A JP16385480 A JP 16385480A JP S5786747 A JPS5786747 A JP S5786747A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- time
- humidity
- dew condensation
- measuring method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16385480A JPS5786747A (en) | 1980-11-20 | 1980-11-20 | Measuring method for humidity and dew condensation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16385480A JPS5786747A (en) | 1980-11-20 | 1980-11-20 | Measuring method for humidity and dew condensation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5786747A true JPS5786747A (en) | 1982-05-29 |
Family
ID=15782011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16385480A Pending JPS5786747A (en) | 1980-11-20 | 1980-11-20 | Measuring method for humidity and dew condensation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5786747A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2596864A1 (fr) * | 1986-04-05 | 1987-10-09 | Bosch Gmbh Robert | Procede pour exploiter un detecteur et dispositif pour la mise en oeuvre de ce procede, notamment pour determiner l'humidite relative de l'air |
US6180423B1 (en) * | 1997-07-02 | 2001-01-30 | Matsushita Electronics Corporation | Method for wafer polishing and method for polishing pad dressing |
-
1980
- 1980-11-20 JP JP16385480A patent/JPS5786747A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2596864A1 (fr) * | 1986-04-05 | 1987-10-09 | Bosch Gmbh Robert | Procede pour exploiter un detecteur et dispositif pour la mise en oeuvre de ce procede, notamment pour determiner l'humidite relative de l'air |
US6180423B1 (en) * | 1997-07-02 | 2001-01-30 | Matsushita Electronics Corporation | Method for wafer polishing and method for polishing pad dressing |
US6428398B2 (en) | 1997-07-02 | 2002-08-06 | Matsushita Electric Industrial Co., Ltd. | Method for wafer polishing and method for polishing-pad dressing |
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