JPS5774601A - Apparatus for fixing finely displacing table - Google Patents

Apparatus for fixing finely displacing table

Info

Publication number
JPS5774601A
JPS5774601A JP15160280A JP15160280A JPS5774601A JP S5774601 A JPS5774601 A JP S5774601A JP 15160280 A JP15160280 A JP 15160280A JP 15160280 A JP15160280 A JP 15160280A JP S5774601 A JPS5774601 A JP S5774601A
Authority
JP
Japan
Prior art keywords
section
finely
displacing
displacing table
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15160280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318682B2 (enrdf_load_stackoverflow
Inventor
Takaisa Koyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pentel Co Ltd
Original Assignee
Pentel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pentel Co Ltd filed Critical Pentel Co Ltd
Priority to JP15160280A priority Critical patent/JPS5774601A/ja
Publication of JPS5774601A publication Critical patent/JPS5774601A/ja
Publication of JPS6318682B2 publication Critical patent/JPS6318682B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
JP15160280A 1980-10-29 1980-10-29 Apparatus for fixing finely displacing table Granted JPS5774601A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15160280A JPS5774601A (en) 1980-10-29 1980-10-29 Apparatus for fixing finely displacing table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15160280A JPS5774601A (en) 1980-10-29 1980-10-29 Apparatus for fixing finely displacing table

Publications (2)

Publication Number Publication Date
JPS5774601A true JPS5774601A (en) 1982-05-10
JPS6318682B2 JPS6318682B2 (enrdf_load_stackoverflow) 1988-04-19

Family

ID=15522110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15160280A Granted JPS5774601A (en) 1980-10-29 1980-10-29 Apparatus for fixing finely displacing table

Country Status (1)

Country Link
JP (1) JPS5774601A (enrdf_load_stackoverflow)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132387A (ja) * 1982-12-15 1984-07-30 アルカテル　エヌ．ブイ 物体のバツクラツシ無し変位を行う調節装置
JPS61136420A (ja) * 1984-08-30 1986-06-24 ザ・ビ−オ−シ−・グル−プ・ピ−エルシ− 混合ガスの分離装置
JPS61164759A (ja) * 1985-01-14 1986-07-25 Nippon Telegr & Teleph Corp <Ntt> 微動移動機構
US4888878A (en) * 1986-09-09 1989-12-26 Hitachi Construction Machinery Co., Ltd. Fine positioning device
WO1991001848A1 (en) * 1989-08-04 1991-02-21 Hatheway Alson E Precision motion transducer
US5105552A (en) * 1987-09-09 1992-04-21 Institut Superieur D'etat De Surface (I S E S) Procedure and sliding support for a profilometer
US5123174A (en) * 1989-04-28 1992-06-23 Nissha Printing Co., Ltd. Positioning table
US5142791A (en) * 1982-02-26 1992-09-01 Hitachi, Ltd. Apparatus for positioning sample
US5180975A (en) * 1989-11-16 1993-01-19 Advantest Corporation Positioning device and IC conveyor utilizing the same
JPH074954A (ja) * 1993-01-29 1995-01-10 Westvaco Corp 紙表面の形状を測定するための方法及び装置
US5684707A (en) * 1994-10-03 1997-11-04 Westvaco Corporation Apparatus and method for analyzing paper surface topography
CN102930904A (zh) * 2012-10-10 2013-02-13 北京航空航天大学 基于柔性倾斜梁的用于提高直线电机分辨率的微动平台
CN103465239A (zh) * 2013-09-06 2013-12-25 苏州凯欧机械科技有限公司 一种平面双轴精确定位大工作台

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142791A (en) * 1982-02-26 1992-09-01 Hitachi, Ltd. Apparatus for positioning sample
JPS59132387A (ja) * 1982-12-15 1984-07-30 アルカテル　エヌ．ブイ 物体のバツクラツシ無し変位を行う調節装置
JPS61136420A (ja) * 1984-08-30 1986-06-24 ザ・ビ−オ−シ−・グル−プ・ピ−エルシ− 混合ガスの分離装置
JPS61164759A (ja) * 1985-01-14 1986-07-25 Nippon Telegr & Teleph Corp <Ntt> 微動移動機構
US4991309A (en) * 1986-09-09 1991-02-12 Hitachi Construction Machinery Co., Ltd. Fine positioning device and displacement controller therefor
US4888878A (en) * 1986-09-09 1989-12-26 Hitachi Construction Machinery Co., Ltd. Fine positioning device
US5105552A (en) * 1987-09-09 1992-04-21 Institut Superieur D'etat De Surface (I S E S) Procedure and sliding support for a profilometer
US5123174A (en) * 1989-04-28 1992-06-23 Nissha Printing Co., Ltd. Positioning table
WO1991001848A1 (en) * 1989-08-04 1991-02-21 Hatheway Alson E Precision motion transducer
US5180975A (en) * 1989-11-16 1993-01-19 Advantest Corporation Positioning device and IC conveyor utilizing the same
JPH074954A (ja) * 1993-01-29 1995-01-10 Westvaco Corp 紙表面の形状を測定するための方法及び装置
US5614662A (en) * 1993-01-29 1997-03-25 Westvaco Corporation Apparatus and method for measuring a paper surface roughness
US5684707A (en) * 1994-10-03 1997-11-04 Westvaco Corporation Apparatus and method for analyzing paper surface topography
CN102930904A (zh) * 2012-10-10 2013-02-13 北京航空航天大学 基于柔性倾斜梁的用于提高直线电机分辨率的微动平台
CN102930904B (zh) * 2012-10-10 2015-03-11 北京航空航天大学 基于柔性倾斜梁的用于提高直线电机分辨率的微动平台
CN103465239A (zh) * 2013-09-06 2013-12-25 苏州凯欧机械科技有限公司 一种平面双轴精确定位大工作台

Also Published As

Publication number Publication date
JPS6318682B2 (enrdf_load_stackoverflow) 1988-04-19

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