JPS5771185A - Iii-v group semiconductor device and method of fabricating same - Google Patents
Iii-v group semiconductor device and method of fabricating sameInfo
- Publication number
- JPS5771185A JPS5771185A JP56130387A JP13038781A JPS5771185A JP S5771185 A JPS5771185 A JP S5771185A JP 56130387 A JP56130387 A JP 56130387A JP 13038781 A JP13038781 A JP 13038781A JP S5771185 A JPS5771185 A JP S5771185A
- Authority
- JP
- Japan
- Prior art keywords
- iii
- semiconductor device
- group semiconductor
- fabricating same
- fabricating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
- H01L21/30612—Etching of AIIIBV compounds
- H01L21/30621—Vapour phase etching
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/180,358 US4403241A (en) | 1980-08-22 | 1980-08-22 | Method for etching III-V semiconductors and devices made by this method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5771185A true JPS5771185A (en) | 1982-05-01 |
JPH0552058B2 JPH0552058B2 (ja) | 1993-08-04 |
Family
ID=22660155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56130387A Granted JPS5771185A (en) | 1980-08-22 | 1981-08-21 | Iii-v group semiconductor device and method of fabricating same |
Country Status (3)
Country | Link |
---|---|
US (1) | US4403241A (ja) |
JP (1) | JPS5771185A (ja) |
DE (1) | DE3132555A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117631A (ja) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | 化合物半導体のドライエッチング方法 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3485368D1 (de) * | 1983-11-30 | 1992-01-30 | Toshiba Kawasaki Kk | Verfahren zur herstellung eines halbleiterlasers. |
US4713678A (en) * | 1984-12-07 | 1987-12-15 | Texas Instruments Incorporated | dRAM cell and method |
US4842699A (en) * | 1988-05-10 | 1989-06-27 | Avantek, Inc. | Method of selective via-hole and heat sink plating using a metal mask |
US4808273A (en) * | 1988-05-10 | 1989-02-28 | Avantek, Inc. | Method of forming completely metallized via holes in semiconductors |
US4978639A (en) * | 1989-01-10 | 1990-12-18 | Avantek, Inc. | Method for the simultaneous formation of via-holes and wraparound plating on semiconductor chips |
JPH02271558A (ja) * | 1989-04-12 | 1990-11-06 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP2839376B2 (ja) * | 1991-02-05 | 1998-12-16 | 三菱電機株式会社 | 半導体装置の製造方法 |
JPH05299705A (ja) * | 1992-04-16 | 1993-11-12 | Kobe Steel Ltd | ダイヤモンド薄膜電子デバイス及びその製造方法 |
DE19632626A1 (de) * | 1996-08-13 | 1998-02-19 | Siemens Ag | Verfahren zum Herstellen von Halbleiterkörpern mit MOVPE-Schichtenfolge |
US6908845B2 (en) * | 2002-03-28 | 2005-06-21 | Intel Corporation | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
US6848177B2 (en) | 2002-03-28 | 2005-02-01 | Intel Corporation | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
US20030183943A1 (en) * | 2002-03-28 | 2003-10-02 | Swan Johanna M. | Integrated circuit die and an electronic assembly having a three-dimensional interconnection scheme |
JP2019121750A (ja) * | 2018-01-11 | 2019-07-22 | 東京エレクトロン株式会社 | エッチング方法およびエッチング装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5367374A (en) * | 1976-11-27 | 1978-06-15 | Nec Corp | Manufacture of schottky barrier field effect transistor |
JPS54163688A (en) * | 1978-06-15 | 1979-12-26 | Nippon Electric Co | Preparation of semiconductor element |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL7310279A (ja) * | 1972-07-31 | 1974-02-04 | ||
US3986196A (en) * | 1975-06-30 | 1976-10-12 | Varian Associates | Through-substrate source contact for microwave FET |
US4171234A (en) * | 1976-07-20 | 1979-10-16 | Matsushita Electric Industrial Co., Ltd. | Method of fabricating three-dimensional epitaxial layers utilizing molecular beams of varied angles |
US4162337A (en) * | 1977-11-14 | 1979-07-24 | Bell Telephone Laboratories, Incorporated | Process for fabricating III-V semiconducting devices with electroless gold plating |
US4208241A (en) * | 1978-07-31 | 1980-06-17 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
-
1980
- 1980-08-22 US US06/180,358 patent/US4403241A/en not_active Expired - Lifetime
-
1981
- 1981-08-18 DE DE19813132555 patent/DE3132555A1/de not_active Ceased
- 1981-08-21 JP JP56130387A patent/JPS5771185A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5367374A (en) * | 1976-11-27 | 1978-06-15 | Nec Corp | Manufacture of schottky barrier field effect transistor |
JPS54163688A (en) * | 1978-06-15 | 1979-12-26 | Nippon Electric Co | Preparation of semiconductor element |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117631A (ja) * | 1983-11-30 | 1985-06-25 | Toshiba Corp | 化合物半導体のドライエッチング方法 |
JPH0224016B2 (ja) * | 1983-11-30 | 1990-05-28 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
DE3132555A1 (de) | 1982-06-16 |
US4403241A (en) | 1983-09-06 |
JPH0552058B2 (ja) | 1993-08-04 |
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