JPS5767844A - Surface inspecting device - Google Patents
Surface inspecting deviceInfo
- Publication number
- JPS5767844A JPS5767844A JP14405880A JP14405880A JPS5767844A JP S5767844 A JPS5767844 A JP S5767844A JP 14405880 A JP14405880 A JP 14405880A JP 14405880 A JP14405880 A JP 14405880A JP S5767844 A JPS5767844 A JP S5767844A
- Authority
- JP
- Japan
- Prior art keywords
- field illumination
- light
- observation
- light source
- dark
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14405880A JPS5767844A (en) | 1980-10-15 | 1980-10-15 | Surface inspecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14405880A JPS5767844A (en) | 1980-10-15 | 1980-10-15 | Surface inspecting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5767844A true JPS5767844A (en) | 1982-04-24 |
JPS6321855B2 JPS6321855B2 (ja) | 1988-05-09 |
Family
ID=15353326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14405880A Granted JPS5767844A (en) | 1980-10-15 | 1980-10-15 | Surface inspecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5767844A (ja) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59200908A (ja) * | 1983-04-28 | 1984-11-14 | Hitachi Ltd | ウエハの照明方法およびその装置 |
JPS6129712A (ja) * | 1984-07-23 | 1986-02-10 | Hitachi Ltd | 微細パタ−ンの欠陥検出方法及びその装置 |
JPS6165107A (ja) * | 1984-09-07 | 1986-04-03 | Hitachi Ltd | 表面欠陥検査方法 |
JPS61175513A (ja) * | 1985-01-31 | 1986-08-07 | Hitachi Ltd | 欠陥検査方法及びその装置 |
JPS6279335A (ja) * | 1985-10-03 | 1987-04-11 | Hitachi Ltd | 欠陥検査方法及びその装置 |
JPS6285809A (ja) * | 1985-10-11 | 1987-04-20 | Mitsubishi Electric Corp | パタ−ン認識用照明装置 |
JPS62134016U (ja) * | 1986-02-18 | 1987-08-24 | ||
FR2665259A1 (fr) * | 1990-07-27 | 1992-01-31 | Giat Ind Sa | Procede et appareil de determination de la qualite de pieces optiques. |
JPH07113752A (ja) * | 1993-10-18 | 1995-05-02 | Murata Mach Ltd | パッケージの汚れ検査方法 |
JPH0829354A (ja) * | 1993-06-08 | 1996-02-02 | Mitsubishi Electric Corp | 微小異物の検出および検査方法、それに用いられる走査型プローブ顕微鏡ならびにこれらを用いた半導体素子または液晶表示素子の製法 |
JP2001133417A (ja) * | 1999-06-15 | 2001-05-18 | Applied Materials Inc | 物体上の欠陥を再検査する装置及び方法 |
JP2010538272A (ja) * | 2007-08-31 | 2010-12-09 | ケーエルエー−テンカー・コーポレーション | 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法 |
WO2022270015A1 (ja) * | 2021-06-21 | 2022-12-29 | ソニーグループ株式会社 | 生体標本観察装置及び生体標本観察システム |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53102792A (en) * | 1977-02-21 | 1978-09-07 | Hitachi Ltd | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
JPS54101389A (en) * | 1978-01-27 | 1979-08-09 | Hitachi Ltd | Foreign matter inspecting method |
-
1980
- 1980-10-15 JP JP14405880A patent/JPS5767844A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53102792A (en) * | 1977-02-21 | 1978-09-07 | Hitachi Ltd | Simultaneous inspecting apparatus of inside and outside of body to be inspected |
JPS54101389A (en) * | 1978-01-27 | 1979-08-09 | Hitachi Ltd | Foreign matter inspecting method |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0151121B2 (ja) * | 1983-04-28 | 1989-11-01 | Hitachi Ltd | |
JPS59200908A (ja) * | 1983-04-28 | 1984-11-14 | Hitachi Ltd | ウエハの照明方法およびその装置 |
JPH0437922B2 (ja) * | 1984-07-23 | 1992-06-22 | Hitachi Ltd | |
JPS6129712A (ja) * | 1984-07-23 | 1986-02-10 | Hitachi Ltd | 微細パタ−ンの欠陥検出方法及びその装置 |
JPS6165107A (ja) * | 1984-09-07 | 1986-04-03 | Hitachi Ltd | 表面欠陥検査方法 |
JPS61175513A (ja) * | 1985-01-31 | 1986-08-07 | Hitachi Ltd | 欠陥検査方法及びその装置 |
JPS6279335A (ja) * | 1985-10-03 | 1987-04-11 | Hitachi Ltd | 欠陥検査方法及びその装置 |
JPS6285809A (ja) * | 1985-10-11 | 1987-04-20 | Mitsubishi Electric Corp | パタ−ン認識用照明装置 |
JPH0418246B2 (ja) * | 1985-10-11 | 1992-03-27 | Mitsubishi Electric Corp | |
JPS62134016U (ja) * | 1986-02-18 | 1987-08-24 | ||
FR2665259A1 (fr) * | 1990-07-27 | 1992-01-31 | Giat Ind Sa | Procede et appareil de determination de la qualite de pieces optiques. |
JPH0829354A (ja) * | 1993-06-08 | 1996-02-02 | Mitsubishi Electric Corp | 微小異物の検出および検査方法、それに用いられる走査型プローブ顕微鏡ならびにこれらを用いた半導体素子または液晶表示素子の製法 |
JPH07113752A (ja) * | 1993-10-18 | 1995-05-02 | Murata Mach Ltd | パッケージの汚れ検査方法 |
JP2001133417A (ja) * | 1999-06-15 | 2001-05-18 | Applied Materials Inc | 物体上の欠陥を再検査する装置及び方法 |
JP2010538272A (ja) * | 2007-08-31 | 2010-12-09 | ケーエルエー−テンカー・コーポレーション | 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法 |
JP2015215349A (ja) * | 2007-08-31 | 2015-12-03 | ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation | 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法 |
JP2017167152A (ja) * | 2007-08-31 | 2017-09-21 | ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation | 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法 |
JP2019015742A (ja) * | 2007-08-31 | 2019-01-31 | ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation | 試料を二つの別個のチャンネルで同時に検査するためのシステム |
WO2022270015A1 (ja) * | 2021-06-21 | 2022-12-29 | ソニーグループ株式会社 | 生体標本観察装置及び生体標本観察システム |
Also Published As
Publication number | Publication date |
---|---|
JPS6321855B2 (ja) | 1988-05-09 |
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