JPS5767844A - Surface inspecting device - Google Patents

Surface inspecting device

Info

Publication number
JPS5767844A
JPS5767844A JP14405880A JP14405880A JPS5767844A JP S5767844 A JPS5767844 A JP S5767844A JP 14405880 A JP14405880 A JP 14405880A JP 14405880 A JP14405880 A JP 14405880A JP S5767844 A JPS5767844 A JP S5767844A
Authority
JP
Japan
Prior art keywords
field illumination
light
observation
light source
dark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14405880A
Other languages
English (en)
Other versions
JPS6321855B2 (ja
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP14405880A priority Critical patent/JPS5767844A/ja
Publication of JPS5767844A publication Critical patent/JPS5767844A/ja
Publication of JPS6321855B2 publication Critical patent/JPS6321855B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14405880A 1980-10-15 1980-10-15 Surface inspecting device Granted JPS5767844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14405880A JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14405880A JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Publications (2)

Publication Number Publication Date
JPS5767844A true JPS5767844A (en) 1982-04-24
JPS6321855B2 JPS6321855B2 (ja) 1988-05-09

Family

ID=15353326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14405880A Granted JPS5767844A (en) 1980-10-15 1980-10-15 Surface inspecting device

Country Status (1)

Country Link
JP (1) JPS5767844A (ja)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置
JPS6129712A (ja) * 1984-07-23 1986-02-10 Hitachi Ltd 微細パタ−ンの欠陥検出方法及びその装置
JPS6165107A (ja) * 1984-09-07 1986-04-03 Hitachi Ltd 表面欠陥検査方法
JPS61175513A (ja) * 1985-01-31 1986-08-07 Hitachi Ltd 欠陥検査方法及びその装置
JPS6279335A (ja) * 1985-10-03 1987-04-11 Hitachi Ltd 欠陥検査方法及びその装置
JPS6285809A (ja) * 1985-10-11 1987-04-20 Mitsubishi Electric Corp パタ−ン認識用照明装置
JPS62134016U (ja) * 1986-02-18 1987-08-24
FR2665259A1 (fr) * 1990-07-27 1992-01-31 Giat Ind Sa Procede et appareil de determination de la qualite de pieces optiques.
JPH07113752A (ja) * 1993-10-18 1995-05-02 Murata Mach Ltd パッケージの汚れ検査方法
JPH0829354A (ja) * 1993-06-08 1996-02-02 Mitsubishi Electric Corp 微小異物の検出および検査方法、それに用いられる走査型プローブ顕微鏡ならびにこれらを用いた半導体素子または液晶表示素子の製法
JP2001133417A (ja) * 1999-06-15 2001-05-18 Applied Materials Inc 物体上の欠陥を再検査する装置及び方法
JP2010538272A (ja) * 2007-08-31 2010-12-09 ケーエルエー−テンカー・コーポレーション 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法
WO2022270015A1 (ja) * 2021-06-21 2022-12-29 ソニーグループ株式会社 生体標本観察装置及び生体標本観察システム

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JPS54101389A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspecting method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53102792A (en) * 1977-02-21 1978-09-07 Hitachi Ltd Simultaneous inspecting apparatus of inside and outside of body to be inspected
JPS54101389A (en) * 1978-01-27 1979-08-09 Hitachi Ltd Foreign matter inspecting method

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0151121B2 (ja) * 1983-04-28 1989-11-01 Hitachi Ltd
JPS59200908A (ja) * 1983-04-28 1984-11-14 Hitachi Ltd ウエハの照明方法およびその装置
JPH0437922B2 (ja) * 1984-07-23 1992-06-22 Hitachi Ltd
JPS6129712A (ja) * 1984-07-23 1986-02-10 Hitachi Ltd 微細パタ−ンの欠陥検出方法及びその装置
JPS6165107A (ja) * 1984-09-07 1986-04-03 Hitachi Ltd 表面欠陥検査方法
JPS61175513A (ja) * 1985-01-31 1986-08-07 Hitachi Ltd 欠陥検査方法及びその装置
JPS6279335A (ja) * 1985-10-03 1987-04-11 Hitachi Ltd 欠陥検査方法及びその装置
JPS6285809A (ja) * 1985-10-11 1987-04-20 Mitsubishi Electric Corp パタ−ン認識用照明装置
JPH0418246B2 (ja) * 1985-10-11 1992-03-27 Mitsubishi Electric Corp
JPS62134016U (ja) * 1986-02-18 1987-08-24
FR2665259A1 (fr) * 1990-07-27 1992-01-31 Giat Ind Sa Procede et appareil de determination de la qualite de pieces optiques.
JPH0829354A (ja) * 1993-06-08 1996-02-02 Mitsubishi Electric Corp 微小異物の検出および検査方法、それに用いられる走査型プローブ顕微鏡ならびにこれらを用いた半導体素子または液晶表示素子の製法
JPH07113752A (ja) * 1993-10-18 1995-05-02 Murata Mach Ltd パッケージの汚れ検査方法
JP2001133417A (ja) * 1999-06-15 2001-05-18 Applied Materials Inc 物体上の欠陥を再検査する装置及び方法
JP2010538272A (ja) * 2007-08-31 2010-12-09 ケーエルエー−テンカー・コーポレーション 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法
JP2015215349A (ja) * 2007-08-31 2015-12-03 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法
JP2017167152A (ja) * 2007-08-31 2017-09-21 ケーエルエー−テンカー・コーポレーションKla−Tencor Corporation 試料を二つの別個のチャンネルで同時に検査するためのシステムおよび方法
JP2019015742A (ja) * 2007-08-31 2019-01-31 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ 試料を二つの別個のチャンネルで同時に検査するためのシステム
WO2022270015A1 (ja) * 2021-06-21 2022-12-29 ソニーグループ株式会社 生体標本観察装置及び生体標本観察システム

Also Published As

Publication number Publication date
JPS6321855B2 (ja) 1988-05-09

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