JPS5763406A - Measuring method and device for shape of planary pattern - Google Patents

Measuring method and device for shape of planary pattern

Info

Publication number
JPS5763406A
JPS5763406A JP13890580A JP13890580A JPS5763406A JP S5763406 A JPS5763406 A JP S5763406A JP 13890580 A JP13890580 A JP 13890580A JP 13890580 A JP13890580 A JP 13890580A JP S5763406 A JPS5763406 A JP S5763406A
Authority
JP
Japan
Prior art keywords
pattern
shape
planar pattern
sensor
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13890580A
Other languages
English (en)
Inventor
Kenji Yamaguchi
Jiro Koga
Shigehisa Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN Institute of Physical and Chemical Research
Original Assignee
RIKEN Institute of Physical and Chemical Research
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN Institute of Physical and Chemical Research filed Critical RIKEN Institute of Physical and Chemical Research
Priority to JP13890580A priority Critical patent/JPS5763406A/ja
Publication of JPS5763406A publication Critical patent/JPS5763406A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Input (AREA)
JP13890580A 1980-10-03 1980-10-03 Measuring method and device for shape of planary pattern Pending JPS5763406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13890580A JPS5763406A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of planary pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13890580A JPS5763406A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of planary pattern

Publications (1)

Publication Number Publication Date
JPS5763406A true JPS5763406A (en) 1982-04-16

Family

ID=15232867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13890580A Pending JPS5763406A (en) 1980-10-03 1980-10-03 Measuring method and device for shape of planary pattern

Country Status (1)

Country Link
JP (1) JPS5763406A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291803A (ja) * 1985-10-18 1987-04-27 Ya Man Ltd 回転体の位置検出装置
JPH02216004A (ja) * 1989-02-17 1990-08-28 Toyo Seiki Kk 複合同期信号を発するｃｃｄカメラの画像処理方法
JP2016043415A (ja) * 2014-08-20 2016-04-04 Ｊｆｅスチール株式会社 厚鋼板の圧延方法および装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6291803A (ja) * 1985-10-18 1987-04-27 Ya Man Ltd 回転体の位置検出装置
JPH02216004A (ja) * 1989-02-17 1990-08-28 Toyo Seiki Kk 複合同期信号を発するｃｃｄカメラの画像処理方法
JP2016043415A (ja) * 2014-08-20 2016-04-04 Ｊｆｅスチール株式会社 厚鋼板の圧延方法および装置

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