JPS57165702A - Two-dimentional magnetic scale device - Google Patents

Two-dimentional magnetic scale device

Info

Publication number
JPS57165702A
JPS57165702A JP5133481A JP5133481A JPS57165702A JP S57165702 A JPS57165702 A JP S57165702A JP 5133481 A JP5133481 A JP 5133481A JP 5133481 A JP5133481 A JP 5133481A JP S57165702 A JPS57165702 A JP S57165702A
Authority
JP
Japan
Prior art keywords
magnetic
magnetized
poles
coordinate
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5133481A
Other languages
Japanese (ja)
Other versions
JPS5856912B2 (en
Inventor
Takashi Mikoshiba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Macome Corp
Original Assignee
Macome Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Macome Corp filed Critical Macome Corp
Priority to JP56051334A priority Critical patent/JPS5856912B2/en
Publication of JPS57165702A publication Critical patent/JPS57165702A/en
Publication of JPS5856912B2 publication Critical patent/JPS5856912B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Position Input By Displaying (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE:To simplify a structure and to stabilize a motion, by a mithod wherein a magnetic scale plate is used with a scale plate, a moving displacement and an X Y coordinate of a magnetic sensor, in which magnetic detecting heads in X- and Y-drections are are monolithically united, adre measured in a digital manner. CONSTITUTION:A magnetic pattern 1'' is formed such that N-poles are magnetized to lattice points aligned in X- and Y-directions at given pitches and S-poles are magnetized to diagonal points thereof. Resulting from the movement of a magnetic detecting substance, in which X- and Y-direction detecting heads 2 and 2', having their detecting region widths equal to lambda, are united monolithically, from a reference pattern 1'', outputs 3 and 3' are independently obtained at the magnetic detecting heads 2 and 2'. This permits the measurement of moving components in X- and Y-directions, and enables to obtain readings of an X Y coordinate at a new point through measurement of a moving displacement at a time when further moved to another arbitrary point.
JP56051334A 1981-04-06 1981-04-06 2D magnetic scale device Expired JPS5856912B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56051334A JPS5856912B2 (en) 1981-04-06 1981-04-06 2D magnetic scale device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56051334A JPS5856912B2 (en) 1981-04-06 1981-04-06 2D magnetic scale device

Publications (2)

Publication Number Publication Date
JPS57165702A true JPS57165702A (en) 1982-10-12
JPS5856912B2 JPS5856912B2 (en) 1983-12-17

Family

ID=12884016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56051334A Expired JPS5856912B2 (en) 1981-04-06 1981-04-06 2D magnetic scale device

Country Status (1)

Country Link
JP (1) JPS5856912B2 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175020A (en) * 1982-04-05 1983-10-14 Telmec Co Ltd Two dimensional accurate positioning device
JPS60168006U (en) * 1984-04-16 1985-11-07 日本電気株式会社 position detector
JPS60192036U (en) * 1984-05-28 1985-12-20 昭和電工株式会社 Wiring board for coordinate measuring devices
JPS61144404U (en) * 1985-02-28 1986-09-06
JPS62172545U (en) * 1986-04-21 1987-11-02
JPS6332750U (en) * 1986-08-11 1988-03-02
US5012586A (en) * 1989-08-28 1991-05-07 Ashworth Anthony J Plotting and drafting apparatus with magnetic guide
US6127749A (en) * 1999-02-10 2000-10-03 Nikon Corporation Of Japan Two-dimensional electric motor
WO2004003480A1 (en) * 2002-06-27 2004-01-08 Philips Intellectual Property & Standards Gmbh Angular displacement encoder with two magnetic tracks
JP2006349377A (en) * 2005-06-13 2006-12-28 Shinko Electric Co Ltd Two-degree-of-freedom sensor
JP2010139334A (en) * 2008-12-10 2010-06-24 Nikon Corp Absolute encoder and mobile unit
CN102007366A (en) * 2007-06-27 2011-04-06 布鲁克斯自动化公司 Multiple dimension position sensor
WO2017047781A1 (en) * 2015-09-18 2017-03-23 日本電産株式会社 Linear motion/rotation detector
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175020A (en) * 1982-04-05 1983-10-14 Telmec Co Ltd Two dimensional accurate positioning device
JPS60168006U (en) * 1984-04-16 1985-11-07 日本電気株式会社 position detector
JPS60192036U (en) * 1984-05-28 1985-12-20 昭和電工株式会社 Wiring board for coordinate measuring devices
JPS61144404U (en) * 1985-02-28 1986-09-06
JPS62172545U (en) * 1986-04-21 1987-11-02
JPS6332750U (en) * 1986-08-11 1988-03-02
US5012586A (en) * 1989-08-28 1991-05-07 Ashworth Anthony J Plotting and drafting apparatus with magnetic guide
US6455956B1 (en) 1999-02-10 2002-09-24 Nikon Corporation Two-dimensional electric motor
US6127749A (en) * 1999-02-10 2000-10-03 Nikon Corporation Of Japan Two-dimensional electric motor
WO2004003480A1 (en) * 2002-06-27 2004-01-08 Philips Intellectual Property & Standards Gmbh Angular displacement encoder with two magnetic tracks
US7119535B2 (en) 2002-06-27 2006-10-10 Koninklijke Philips Electronics N.V. Angular displacement encoder with two magnetic tracks
CN100420918C (en) * 2002-06-27 2008-09-24 Nxp股份有限公司 Angular displacement encoder with two magnetic tracks
JP2006349377A (en) * 2005-06-13 2006-12-28 Shinko Electric Co Ltd Two-degree-of-freedom sensor
CN102007366A (en) * 2007-06-27 2011-04-06 布鲁克斯自动化公司 Multiple dimension position sensor
JP2011517766A (en) * 2007-06-27 2011-06-16 ブルックス オートメーション インコーポレイテッド Multi-dimensional position sensor
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor
JP2010139334A (en) * 2008-12-10 2010-06-24 Nikon Corp Absolute encoder and mobile unit
WO2017047781A1 (en) * 2015-09-18 2017-03-23 日本電産株式会社 Linear motion/rotation detector
US10436613B2 (en) 2015-09-18 2019-10-08 Nidec Corporation Linear motion and rotation detector

Also Published As

Publication number Publication date
JPS5856912B2 (en) 1983-12-17

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