JPS5324852A - Measuring system of photoelectric type - Google Patents

Measuring system of photoelectric type

Info

Publication number
JPS5324852A
JPS5324852A JP9905276A JP9905276A JPS5324852A JP S5324852 A JPS5324852 A JP S5324852A JP 9905276 A JP9905276 A JP 9905276A JP 9905276 A JP9905276 A JP 9905276A JP S5324852 A JPS5324852 A JP S5324852A
Authority
JP
Japan
Prior art keywords
measuring system
photoelectric type
mark
detect
photoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9905276A
Other languages
Japanese (ja)
Inventor
Junpei Tsujiuchi
Toshio Honda
Hiroshi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP9905276A priority Critical patent/JPS5324852A/en
Publication of JPS5324852A publication Critical patent/JPS5324852A/en
Pending legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE: To detect the position of the corners of mark, which is formed on a test piece, to detect the output signals of a photoelectric element by projecting the image of the mark on an image sensor which has a plurality of photoelectric elements arranged in linear positions.
COPYRIGHT: (C)1978,JPO&Japio
JP9905276A 1976-08-19 1976-08-19 Measuring system of photoelectric type Pending JPS5324852A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9905276A JPS5324852A (en) 1976-08-19 1976-08-19 Measuring system of photoelectric type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9905276A JPS5324852A (en) 1976-08-19 1976-08-19 Measuring system of photoelectric type

Publications (1)

Publication Number Publication Date
JPS5324852A true JPS5324852A (en) 1978-03-08

Family

ID=14236811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9905276A Pending JPS5324852A (en) 1976-08-19 1976-08-19 Measuring system of photoelectric type

Country Status (1)

Country Link
JP (1) JPS5324852A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0303352A2 (en) * 1987-08-13 1989-02-15 Coal Industry (Patents) Limited The method of optically measuring relative angular movement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0303352A2 (en) * 1987-08-13 1989-02-15 Coal Industry (Patents) Limited The method of optically measuring relative angular movement
EP0303352A3 (en) * 1987-08-13 1991-06-26 Coal Industry (Patents) Limited The method of optically measuring relative angular movement

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