JPS5761904A - Pattern measuring device - Google Patents

Pattern measuring device

Info

Publication number
JPS5761904A
JPS5761904A JP13582280A JP13582280A JPS5761904A JP S5761904 A JPS5761904 A JP S5761904A JP 13582280 A JP13582280 A JP 13582280A JP 13582280 A JP13582280 A JP 13582280A JP S5761904 A JPS5761904 A JP S5761904A
Authority
JP
Japan
Prior art keywords
diffracted light
light intensity
measured
basic pattern
degree
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13582280A
Other languages
English (en)
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13582280A priority Critical patent/JPS5761904A/ja
Publication of JPS5761904A publication Critical patent/JPS5761904A/ja
Pending legal-status Critical Current

Links

JP13582280A 1980-10-01 1980-10-01 Pattern measuring device Pending JPS5761904A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13582280A JPS5761904A (en) 1980-10-01 1980-10-01 Pattern measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13582280A JPS5761904A (en) 1980-10-01 1980-10-01 Pattern measuring device

Publications (1)

Publication Number Publication Date
JPS5761904A true JPS5761904A (en) 1982-04-14

Family

ID=15160602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13582280A Pending JPS5761904A (en) 1980-10-01 1980-10-01 Pattern measuring device

Country Status (1)

Country Link
JP (1) JPS5761904A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111473735A (zh) * 2020-04-24 2020-07-31 黄宏琪 一种在线测量光纤预制棒直径和弓曲度的装置及方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111473735A (zh) * 2020-04-24 2020-07-31 黄宏琪 一种在线测量光纤预制棒直径和弓曲度的装置及方法
CN111473735B (zh) * 2020-04-24 2022-04-15 黄宏琪 一种在线测量光纤预制棒直径和弓曲度的装置及方法

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