JPS5761582A - Thermal printing head method of manufacutre thereof - Google Patents
Thermal printing head method of manufacutre thereofInfo
- Publication number
- JPS5761582A JPS5761582A JP55137448A JP13744880A JPS5761582A JP S5761582 A JPS5761582 A JP S5761582A JP 55137448 A JP55137448 A JP 55137448A JP 13744880 A JP13744880 A JP 13744880A JP S5761582 A JPS5761582 A JP S5761582A
- Authority
- JP
- Japan
- Prior art keywords
- range
- thin film
- printing head
- thermal printing
- relationship
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain a reliable, and physically and chemically stable thermal printing head having a ling life, which uses a heating resistor comprising a Ta-Si-O thin film, by setting the relationship of the film thickness of the thin film with its specific resistance within a specified range.
CONSTITUTION: A sintered target that has been prepared by mixing thallium (Ta) and silicon oxide (Si2) is used, the Ta ratio of the target is controlled in the range of 64W55mol% by weight, the partial pressure of argon in the argon gas atmosphere wherein spattering is effected is controlled in the range of 10W40mTorr, and the relationship of the film thickness t(Å) and the specific resistance ρ(μΩ-cm) of the obtained Ta-Si-O thin film, when expressed in terms of rectangular coordinates, is set such that it is in the range surrounded by a pentagon having apexes including A(2.000,2.000), L(1.600,3.600), X(3.000,5.500), F(4.200,5.900) and Z(5.800,5.200), and preferably by a triangle having apexes including E, Y and C.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55137448A JPS5761582A (en) | 1980-10-01 | 1980-10-01 | Thermal printing head method of manufacutre thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55137448A JPS5761582A (en) | 1980-10-01 | 1980-10-01 | Thermal printing head method of manufacutre thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5761582A true JPS5761582A (en) | 1982-04-14 |
JPH026201B2 JPH026201B2 (en) | 1990-02-08 |
Family
ID=15198844
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55137448A Granted JPS5761582A (en) | 1980-10-01 | 1980-10-01 | Thermal printing head method of manufacutre thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5761582A (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167056A (en) * | 1986-01-20 | 1987-07-23 | Kyocera Corp | Thermal head |
US5444475A (en) * | 1992-07-03 | 1995-08-22 | Hitachi Koki Co., Ltd. | Thermal recording head |
JPH08207291A (en) * | 1994-07-14 | 1996-08-13 | Hitachi Koki Co Ltd | Manufacture of ink jet recording head and recording device |
JPH09314839A (en) * | 1996-05-24 | 1997-12-09 | Hitachi Koki Co Ltd | Ink jet recording head |
US5710583A (en) * | 1992-05-29 | 1998-01-20 | Hitachi Koki Co., Ltd. | Ink jet image recorder |
EP0825026A2 (en) * | 1996-08-22 | 1998-02-25 | Canon Kabushiki Kaisha | An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
US5729260A (en) * | 1993-10-29 | 1998-03-17 | Hitachi Koki Co., Ltd. | Ink jet printer with high power, short duration pulse |
US5831648A (en) * | 1992-05-29 | 1998-11-03 | Hitachi Koki Co., Ltd. | Ink jet recording head |
US5966153A (en) * | 1995-12-27 | 1999-10-12 | Hitachi Koki Co., Ltd. | Ink jet printing device |
US5980024A (en) * | 1993-10-29 | 1999-11-09 | Hitachi Koki Co, Ltd. | Ink jet print head and a method of driving ink therefrom |
US6547372B1 (en) | 2001-07-27 | 2003-04-15 | Kyocera Corporation | Ink jet head |
EP2978608A4 (en) * | 2013-07-12 | 2017-08-30 | Hewlett-Packard Development Company L.P. | Thermal inkjet printhead stack with amorphous metal resistor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH057494U (en) * | 1991-07-17 | 1993-02-02 | 三洋機工株式会社 | Ruler for scribing |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311037A (en) * | 1976-07-19 | 1978-02-01 | Toshiba Corp | Thin film thermal head |
-
1980
- 1980-10-01 JP JP55137448A patent/JPS5761582A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311037A (en) * | 1976-07-19 | 1978-02-01 | Toshiba Corp | Thin film thermal head |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62167056A (en) * | 1986-01-20 | 1987-07-23 | Kyocera Corp | Thermal head |
US5831648A (en) * | 1992-05-29 | 1998-11-03 | Hitachi Koki Co., Ltd. | Ink jet recording head |
US5710583A (en) * | 1992-05-29 | 1998-01-20 | Hitachi Koki Co., Ltd. | Ink jet image recorder |
US5444475A (en) * | 1992-07-03 | 1995-08-22 | Hitachi Koki Co., Ltd. | Thermal recording head |
US5980024A (en) * | 1993-10-29 | 1999-11-09 | Hitachi Koki Co, Ltd. | Ink jet print head and a method of driving ink therefrom |
US5729260A (en) * | 1993-10-29 | 1998-03-17 | Hitachi Koki Co., Ltd. | Ink jet printer with high power, short duration pulse |
JPH08207291A (en) * | 1994-07-14 | 1996-08-13 | Hitachi Koki Co Ltd | Manufacture of ink jet recording head and recording device |
US5966153A (en) * | 1995-12-27 | 1999-10-12 | Hitachi Koki Co., Ltd. | Ink jet printing device |
JPH09314839A (en) * | 1996-05-24 | 1997-12-09 | Hitachi Koki Co Ltd | Ink jet recording head |
EP0825026A3 (en) * | 1996-08-22 | 1999-07-21 | Canon Kabushiki Kaisha | An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
EP0825026A2 (en) * | 1996-08-22 | 1998-02-25 | Canon Kabushiki Kaisha | An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
CN1089692C (en) * | 1996-08-22 | 2002-08-28 | 佳能株式会社 | Ink jetting chip, jetting head, jetting device and method for making ink jetting recording head |
US6769762B2 (en) | 1996-08-22 | 2004-08-03 | Canon Kabushiki Kaisha | Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
US6547372B1 (en) | 2001-07-27 | 2003-04-15 | Kyocera Corporation | Ink jet head |
EP2978608A4 (en) * | 2013-07-12 | 2017-08-30 | Hewlett-Packard Development Company L.P. | Thermal inkjet printhead stack with amorphous metal resistor |
Also Published As
Publication number | Publication date |
---|---|
JPH026201B2 (en) | 1990-02-08 |
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