JPS5761582A - Thermal printing head method of manufacutre thereof - Google Patents

Thermal printing head method of manufacutre thereof

Info

Publication number
JPS5761582A
JPS5761582A JP55137448A JP13744880A JPS5761582A JP S5761582 A JPS5761582 A JP S5761582A JP 55137448 A JP55137448 A JP 55137448A JP 13744880 A JP13744880 A JP 13744880A JP S5761582 A JPS5761582 A JP S5761582A
Authority
JP
Japan
Prior art keywords
range
thin film
printing head
thermal printing
relationship
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55137448A
Other languages
Japanese (ja)
Other versions
JPH026201B2 (en
Inventor
Shozo Takeno
Kazunari Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55137448A priority Critical patent/JPS5761582A/en
Publication of JPS5761582A publication Critical patent/JPS5761582A/en
Publication of JPH026201B2 publication Critical patent/JPH026201B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a reliable, and physically and chemically stable thermal printing head having a ling life, which uses a heating resistor comprising a Ta-Si-O thin film, by setting the relationship of the film thickness of the thin film with its specific resistance within a specified range.
CONSTITUTION: A sintered target that has been prepared by mixing thallium (Ta) and silicon oxide (Si2) is used, the Ta ratio of the target is controlled in the range of 64W55mol% by weight, the partial pressure of argon in the argon gas atmosphere wherein spattering is effected is controlled in the range of 10W40mTorr, and the relationship of the film thickness t(Å) and the specific resistance ρ(μΩ-cm) of the obtained Ta-Si-O thin film, when expressed in terms of rectangular coordinates, is set such that it is in the range surrounded by a pentagon having apexes including A(2.000,2.000), L(1.600,3.600), X(3.000,5.500), F(4.200,5.900) and Z(5.800,5.200), and preferably by a triangle having apexes including E, Y and C.
COPYRIGHT: (C)1982,JPO&Japio
JP55137448A 1980-10-01 1980-10-01 Thermal printing head method of manufacutre thereof Granted JPS5761582A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55137448A JPS5761582A (en) 1980-10-01 1980-10-01 Thermal printing head method of manufacutre thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55137448A JPS5761582A (en) 1980-10-01 1980-10-01 Thermal printing head method of manufacutre thereof

Publications (2)

Publication Number Publication Date
JPS5761582A true JPS5761582A (en) 1982-04-14
JPH026201B2 JPH026201B2 (en) 1990-02-08

Family

ID=15198844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55137448A Granted JPS5761582A (en) 1980-10-01 1980-10-01 Thermal printing head method of manufacutre thereof

Country Status (1)

Country Link
JP (1) JPS5761582A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167056A (en) * 1986-01-20 1987-07-23 Kyocera Corp Thermal head
US5444475A (en) * 1992-07-03 1995-08-22 Hitachi Koki Co., Ltd. Thermal recording head
JPH08207291A (en) * 1994-07-14 1996-08-13 Hitachi Koki Co Ltd Manufacture of ink jet recording head and recording device
JPH09314839A (en) * 1996-05-24 1997-12-09 Hitachi Koki Co Ltd Ink jet recording head
US5710583A (en) * 1992-05-29 1998-01-20 Hitachi Koki Co., Ltd. Ink jet image recorder
EP0825026A2 (en) * 1996-08-22 1998-02-25 Canon Kabushiki Kaisha An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
US5729260A (en) * 1993-10-29 1998-03-17 Hitachi Koki Co., Ltd. Ink jet printer with high power, short duration pulse
US5831648A (en) * 1992-05-29 1998-11-03 Hitachi Koki Co., Ltd. Ink jet recording head
US5966153A (en) * 1995-12-27 1999-10-12 Hitachi Koki Co., Ltd. Ink jet printing device
US5980024A (en) * 1993-10-29 1999-11-09 Hitachi Koki Co, Ltd. Ink jet print head and a method of driving ink therefrom
US6547372B1 (en) 2001-07-27 2003-04-15 Kyocera Corporation Ink jet head
EP2978608A4 (en) * 2013-07-12 2017-08-30 Hewlett-Packard Development Company L.P. Thermal inkjet printhead stack with amorphous metal resistor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057494U (en) * 1991-07-17 1993-02-02 三洋機工株式会社 Ruler for scribing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311037A (en) * 1976-07-19 1978-02-01 Toshiba Corp Thin film thermal head

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311037A (en) * 1976-07-19 1978-02-01 Toshiba Corp Thin film thermal head

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167056A (en) * 1986-01-20 1987-07-23 Kyocera Corp Thermal head
US5831648A (en) * 1992-05-29 1998-11-03 Hitachi Koki Co., Ltd. Ink jet recording head
US5710583A (en) * 1992-05-29 1998-01-20 Hitachi Koki Co., Ltd. Ink jet image recorder
US5444475A (en) * 1992-07-03 1995-08-22 Hitachi Koki Co., Ltd. Thermal recording head
US5980024A (en) * 1993-10-29 1999-11-09 Hitachi Koki Co, Ltd. Ink jet print head and a method of driving ink therefrom
US5729260A (en) * 1993-10-29 1998-03-17 Hitachi Koki Co., Ltd. Ink jet printer with high power, short duration pulse
JPH08207291A (en) * 1994-07-14 1996-08-13 Hitachi Koki Co Ltd Manufacture of ink jet recording head and recording device
US5966153A (en) * 1995-12-27 1999-10-12 Hitachi Koki Co., Ltd. Ink jet printing device
JPH09314839A (en) * 1996-05-24 1997-12-09 Hitachi Koki Co Ltd Ink jet recording head
EP0825026A3 (en) * 1996-08-22 1999-07-21 Canon Kabushiki Kaisha An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
EP0825026A2 (en) * 1996-08-22 1998-02-25 Canon Kabushiki Kaisha An ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
CN1089692C (en) * 1996-08-22 2002-08-28 佳能株式会社 Ink jetting chip, jetting head, jetting device and method for making ink jetting recording head
US6769762B2 (en) 1996-08-22 2004-08-03 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
US6547372B1 (en) 2001-07-27 2003-04-15 Kyocera Corporation Ink jet head
EP2978608A4 (en) * 2013-07-12 2017-08-30 Hewlett-Packard Development Company L.P. Thermal inkjet printhead stack with amorphous metal resistor

Also Published As

Publication number Publication date
JPH026201B2 (en) 1990-02-08

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