JPS5759324A - Device for exposure of electron beam - Google Patents

Device for exposure of electron beam

Info

Publication number
JPS5759324A
JPS5759324A JP55134064A JP13406480A JPS5759324A JP S5759324 A JPS5759324 A JP S5759324A JP 55134064 A JP55134064 A JP 55134064A JP 13406480 A JP13406480 A JP 13406480A JP S5759324 A JPS5759324 A JP S5759324A
Authority
JP
Japan
Prior art keywords
detecting device
light
electron beam
substrate
patterning chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55134064A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261134B2 (enExample
Inventor
Toru Tojo
Yasunobu Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Machine Co Ltd
Original Assignee
Toshiba Corp
Toshiba Machine Co Ltd
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Machine Co Ltd, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55134064A priority Critical patent/JPS5759324A/ja
Publication of JPS5759324A publication Critical patent/JPS5759324A/ja
Publication of JPH0261134B2 publication Critical patent/JPH0261134B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP55134064A 1980-09-26 1980-09-26 Device for exposure of electron beam Granted JPS5759324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55134064A JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55134064A JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Publications (2)

Publication Number Publication Date
JPS5759324A true JPS5759324A (en) 1982-04-09
JPH0261134B2 JPH0261134B2 (enExample) 1990-12-19

Family

ID=15119517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55134064A Granted JPS5759324A (en) 1980-09-26 1980-09-26 Device for exposure of electron beam

Country Status (1)

Country Link
JP (1) JPS5759324A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121230A (en) * 1981-01-21 1982-07-28 Nippon Telegr & Teleph Corp <Ntt> Positioning device of cassette
JPS62128628U (enExample) * 1986-02-07 1987-08-14

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952580A (enExample) * 1972-09-20 1974-05-22

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952580A (enExample) * 1972-09-20 1974-05-22

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121230A (en) * 1981-01-21 1982-07-28 Nippon Telegr & Teleph Corp <Ntt> Positioning device of cassette
JPS62128628U (enExample) * 1986-02-07 1987-08-14

Also Published As

Publication number Publication date
JPH0261134B2 (enExample) 1990-12-19

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