JPS62128628U - - Google Patents
Info
- Publication number
- JPS62128628U JPS62128628U JP1653186U JP1653186U JPS62128628U JP S62128628 U JPS62128628 U JP S62128628U JP 1653186 U JP1653186 U JP 1653186U JP 1653186 U JP1653186 U JP 1653186U JP S62128628 U JPS62128628 U JP S62128628U
- Authority
- JP
- Japan
- Prior art keywords
- sample chamber
- chamber
- preliminary
- lock valve
- air lock
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653186U JPS62128628U (enExample) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653186U JPS62128628U (enExample) | 1986-02-07 | 1986-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62128628U true JPS62128628U (enExample) | 1987-08-14 |
Family
ID=30808471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1653186U Pending JPS62128628U (enExample) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128628U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55102228A (en) * | 1979-01-29 | 1980-08-05 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam exposure device |
| JPS5759324A (en) * | 1980-09-26 | 1982-04-09 | Toshiba Corp | Device for exposure of electron beam |
-
1986
- 1986-02-07 JP JP1653186U patent/JPS62128628U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55102228A (en) * | 1979-01-29 | 1980-08-05 | Nippon Telegr & Teleph Corp <Ntt> | Electron beam exposure device |
| JPS5759324A (en) * | 1980-09-26 | 1982-04-09 | Toshiba Corp | Device for exposure of electron beam |