JPH02132938U - - Google Patents
Info
- Publication number
- JPH02132938U JPH02132938U JP4135389U JP4135389U JPH02132938U JP H02132938 U JPH02132938 U JP H02132938U JP 4135389 U JP4135389 U JP 4135389U JP 4135389 U JP4135389 U JP 4135389U JP H02132938 U JPH02132938 U JP H02132938U
- Authority
- JP
- Japan
- Prior art keywords
- particle flux
- flux monitor
- exhaust
- exhaust pipe
- drive device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 claims description 8
- 230000004907 flux Effects 0.000 claims description 6
- 239000000428 dust Substances 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4135389U JPH02132938U (enExample) | 1989-04-07 | 1989-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4135389U JPH02132938U (enExample) | 1989-04-07 | 1989-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02132938U true JPH02132938U (enExample) | 1990-11-05 |
Family
ID=31551947
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4135389U Pending JPH02132938U (enExample) | 1989-04-07 | 1989-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02132938U (enExample) |
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1989
- 1989-04-07 JP JP4135389U patent/JPH02132938U/ja active Pending