JPS61167934U - - Google Patents
Info
- Publication number
- JPS61167934U JPS61167934U JP3333685U JP3333685U JPS61167934U JP S61167934 U JPS61167934 U JP S61167934U JP 3333685 U JP3333685 U JP 3333685U JP 3333685 U JP3333685 U JP 3333685U JP S61167934 U JPS61167934 U JP S61167934U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- sample
- gas
- vacuum
- switching valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3333685U JPS61167934U (enExample) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3333685U JPS61167934U (enExample) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61167934U true JPS61167934U (enExample) | 1986-10-18 |
Family
ID=30535692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3333685U Pending JPS61167934U (enExample) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167934U (enExample) |
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1985
- 1985-03-11 JP JP3333685U patent/JPS61167934U/ja active Pending