JPH0189452U - - Google Patents
Info
- Publication number
- JPH0189452U JPH0189452U JP18512687U JP18512687U JPH0189452U JP H0189452 U JPH0189452 U JP H0189452U JP 18512687 U JP18512687 U JP 18512687U JP 18512687 U JP18512687 U JP 18512687U JP H0189452 U JPH0189452 U JP H0189452U
- Authority
- JP
- Japan
- Prior art keywords
- evacuated chamber
- dust suction
- high voltage
- evacuating
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185126U JPH0610610Y2 (ja) | 1987-12-04 | 1987-12-04 | 電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987185126U JPH0610610Y2 (ja) | 1987-12-04 | 1987-12-04 | 電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0189452U true JPH0189452U (enExample) | 1989-06-13 |
| JPH0610610Y2 JPH0610610Y2 (ja) | 1994-03-16 |
Family
ID=31476454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987185126U Expired - Lifetime JPH0610610Y2 (ja) | 1987-12-04 | 1987-12-04 | 電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610610Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853829A (ja) * | 1981-09-26 | 1983-03-30 | Fujitsu Ltd | 電子ビ−ム露光装置 |
| JPS611485A (ja) * | 1984-06-13 | 1986-01-07 | Mitsubishi Electric Corp | 電子ビ−ム溶接装置 |
-
1987
- 1987-12-04 JP JP1987185126U patent/JPH0610610Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853829A (ja) * | 1981-09-26 | 1983-03-30 | Fujitsu Ltd | 電子ビ−ム露光装置 |
| JPS611485A (ja) * | 1984-06-13 | 1986-01-07 | Mitsubishi Electric Corp | 電子ビ−ム溶接装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610610Y2 (ja) | 1994-03-16 |