JPS6373854U - - Google Patents
Info
- Publication number
- JPS6373854U JPS6373854U JP16787986U JP16787986U JPS6373854U JP S6373854 U JPS6373854 U JP S6373854U JP 16787986 U JP16787986 U JP 16787986U JP 16787986 U JP16787986 U JP 16787986U JP S6373854 U JPS6373854 U JP S6373854U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- holder
- cylindrical body
- chamber
- exchange chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16787986U JPS6373854U (enExample) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16787986U JPS6373854U (enExample) | 1986-10-31 | 1986-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373854U true JPS6373854U (enExample) | 1988-05-17 |
Family
ID=31100227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16787986U Pending JPS6373854U (enExample) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373854U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009146791A (ja) * | 2007-12-17 | 2009-07-02 | Hitachi High-Technologies Corp | 電子ビーム検査装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5147072A (enExample) * | 1974-10-22 | 1976-04-22 | Furukawa Electric Co Ltd | |
| JPS542055A (en) * | 1977-06-08 | 1979-01-09 | Hitachi Ltd | Test piece treatment unit for scanning electron microscope or the like |
-
1986
- 1986-10-31 JP JP16787986U patent/JPS6373854U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5147072A (enExample) * | 1974-10-22 | 1976-04-22 | Furukawa Electric Co Ltd | |
| JPS542055A (en) * | 1977-06-08 | 1979-01-09 | Hitachi Ltd | Test piece treatment unit for scanning electron microscope or the like |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009146791A (ja) * | 2007-12-17 | 2009-07-02 | Hitachi High-Technologies Corp | 電子ビーム検査装置 |