JPS63136730U - - Google Patents
Info
- Publication number
- JPS63136730U JPS63136730U JP2930587U JP2930587U JPS63136730U JP S63136730 U JPS63136730 U JP S63136730U JP 2930587 U JP2930587 U JP 2930587U JP 2930587 U JP2930587 U JP 2930587U JP S63136730 U JPS63136730 U JP S63136730U
- Authority
- JP
- Japan
- Prior art keywords
- diameter bellows
- small
- sealing ring
- vacuum processing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 2
- 238000005192 partition Methods 0.000 claims 2
- 238000009489 vacuum treatment Methods 0.000 claims 1
Landscapes
- Diaphragms And Bellows (AREA)
- Physical Vapour Deposition (AREA)
- Sealing Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2930587U JPH0422826Y2 (enExample) | 1987-02-26 | 1987-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2930587U JPH0422826Y2 (enExample) | 1987-02-26 | 1987-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63136730U true JPS63136730U (enExample) | 1988-09-08 |
| JPH0422826Y2 JPH0422826Y2 (enExample) | 1992-05-26 |
Family
ID=30833072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2930587U Expired JPH0422826Y2 (enExample) | 1987-02-26 | 1987-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422826Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006281085A (ja) * | 2005-03-31 | 2006-10-19 | Hitachi Eng Co Ltd | 往復動機構を備えた真空装置 |
-
1987
- 1987-02-26 JP JP2930587U patent/JPH0422826Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006281085A (ja) * | 2005-03-31 | 2006-10-19 | Hitachi Eng Co Ltd | 往復動機構を備えた真空装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0422826Y2 (enExample) | 1992-05-26 |