JPH0422826Y2 - - Google Patents

Info

Publication number
JPH0422826Y2
JPH0422826Y2 JP2930587U JP2930587U JPH0422826Y2 JP H0422826 Y2 JPH0422826 Y2 JP H0422826Y2 JP 2930587 U JP2930587 U JP 2930587U JP 2930587 U JP2930587 U JP 2930587U JP H0422826 Y2 JPH0422826 Y2 JP H0422826Y2
Authority
JP
Japan
Prior art keywords
small
diameter bellows
sealing ring
ring
vacuum processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2930587U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63136730U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2930587U priority Critical patent/JPH0422826Y2/ja
Publication of JPS63136730U publication Critical patent/JPS63136730U/ja
Application granted granted Critical
Publication of JPH0422826Y2 publication Critical patent/JPH0422826Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Diaphragms And Bellows (AREA)
  • Physical Vapour Deposition (AREA)
  • Sealing Devices (AREA)
JP2930587U 1987-02-26 1987-02-26 Expired JPH0422826Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2930587U JPH0422826Y2 (enExample) 1987-02-26 1987-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2930587U JPH0422826Y2 (enExample) 1987-02-26 1987-02-26

Publications (2)

Publication Number Publication Date
JPS63136730U JPS63136730U (enExample) 1988-09-08
JPH0422826Y2 true JPH0422826Y2 (enExample) 1992-05-26

Family

ID=30833072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2930587U Expired JPH0422826Y2 (enExample) 1987-02-26 1987-02-26

Country Status (1)

Country Link
JP (1) JPH0422826Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5088767B2 (ja) * 2005-03-31 2012-12-05 株式会社日立エンジニアリング・アンド・サービス 往復動機構を備えた真空装置

Also Published As

Publication number Publication date
JPS63136730U (enExample) 1988-09-08

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