JPS6365952U - - Google Patents
Info
- Publication number
- JPS6365952U JPS6365952U JP15922686U JP15922686U JPS6365952U JP S6365952 U JPS6365952 U JP S6365952U JP 15922686 U JP15922686 U JP 15922686U JP 15922686 U JP15922686 U JP 15922686U JP S6365952 U JPS6365952 U JP S6365952U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- chamber
- preliminary chamber
- electron beam
- preliminary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 5
- 230000001678 irradiating effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15922686U JPS6365952U (enExample) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15922686U JPS6365952U (enExample) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365952U true JPS6365952U (enExample) | 1988-04-30 |
Family
ID=31083459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15922686U Pending JPS6365952U (enExample) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365952U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010061990A (ja) * | 2008-09-03 | 2010-03-18 | Japan Science & Technology Agency | 電子顕微鏡用試料ホルダ。 |
| JP2010518583A (ja) * | 2007-02-06 | 2010-05-27 | エフ・イ−・アイ・カンパニー | 高圧荷電粒子ビーム・システム |
| JP2011258451A (ja) * | 2010-06-10 | 2011-12-22 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |
-
1986
- 1986-10-17 JP JP15922686U patent/JPS6365952U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010518583A (ja) * | 2007-02-06 | 2010-05-27 | エフ・イ−・アイ・カンパニー | 高圧荷電粒子ビーム・システム |
| JP2010061990A (ja) * | 2008-09-03 | 2010-03-18 | Japan Science & Technology Agency | 電子顕微鏡用試料ホルダ。 |
| JP2011258451A (ja) * | 2010-06-10 | 2011-12-22 | Hitachi High-Technologies Corp | 走査電子顕微鏡 |