JPS5759106A - Measuring method for fine clearance - Google Patents

Measuring method for fine clearance

Info

Publication number
JPS5759106A
JPS5759106A JP13289780A JP13289780A JPS5759106A JP S5759106 A JPS5759106 A JP S5759106A JP 13289780 A JP13289780 A JP 13289780A JP 13289780 A JP13289780 A JP 13289780A JP S5759106 A JPS5759106 A JP S5759106A
Authority
JP
Japan
Prior art keywords
light
slider
clearance
interference
comparator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13289780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0338522B2 (enExample
Inventor
Seiichiro Terajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13289780A priority Critical patent/JPS5759106A/ja
Publication of JPS5759106A publication Critical patent/JPS5759106A/ja
Publication of JPH0338522B2 publication Critical patent/JPH0338522B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP13289780A 1980-09-26 1980-09-26 Measuring method for fine clearance Granted JPS5759106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13289780A JPS5759106A (en) 1980-09-26 1980-09-26 Measuring method for fine clearance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13289780A JPS5759106A (en) 1980-09-26 1980-09-26 Measuring method for fine clearance

Publications (2)

Publication Number Publication Date
JPS5759106A true JPS5759106A (en) 1982-04-09
JPH0338522B2 JPH0338522B2 (enExample) 1991-06-11

Family

ID=15092098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13289780A Granted JPS5759106A (en) 1980-09-26 1980-09-26 Measuring method for fine clearance

Country Status (1)

Country Link
JP (1) JPS5759106A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204370A (ja) * 1989-12-29 1991-09-05 Sumitomo Metal Ind Ltd 鉄道車両の空気ばねへの給気方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204370A (ja) * 1989-12-29 1991-09-05 Sumitomo Metal Ind Ltd 鉄道車両の空気ばねへの給気方法

Also Published As

Publication number Publication date
JPH0338522B2 (enExample) 1991-06-11

Similar Documents

Publication Publication Date Title
DE59006727D1 (de) Verfahren und anordnung zur optoelektronischen vermessung von gegenständen.
JPS5793208A (en) Optical system of distance measuring apparatus
JPS56124003A (en) Measuring device for pattern
JPS6344721Y2 (enExample)
GB1384501A (en) Apparatus for comparing the spectral reflectance of coloured surfaces
US2470877A (en) Method and apparatus for detecting variations in the appearance of an object or sample
JPS5759106A (en) Measuring method for fine clearance
JPS5355983A (en) Automatic micro defect detector
JPS5676004A (en) Measuring device of flatness
JPS5665121A (en) Distance measuring and photometric device of camera
JPS54137367A (en) Multi-point temperature monitor
JPS5779454A (en) Detection of pattern used for analysis based on amynological agglutination reaction
JPS5612729A (en) ?alignmening device for ic projection exposure equipment
JPS55157232A (en) Method of inspecting pattern
JPS5712303A (en) Detecting device for center position and size of hole
JPS57211506A (en) Non-contact type measuring device for shape of surface
RU2123663C1 (ru) Цифровой оптико-электронный преобразователь размера
SU1711001A1 (ru) Устройство дл контрол шероховатости поверхности
JPS61120001A (ja) 位置座標測定装置
JPS52153468A (en) Thickness measuring method of substrates
JPS5784411A (en) Focus detecting method
JPS5446065A (en) Non-contact type profile mesuring apparatus
JPS5735704A (en) Surface state measuring method of metallic plate and its device
JPS5456390A (en) Light detecting method
JPS5487547A (en) Lens inspector