JPS5756703A - Length or angle measuring apparatus - Google Patents

Length or angle measuring apparatus

Info

Publication number
JPS5756703A
JPS5756703A JP56022334A JP2233481A JPS5756703A JP S5756703 A JPS5756703 A JP S5756703A JP 56022334 A JP56022334 A JP 56022334A JP 2233481 A JP2233481 A JP 2233481A JP S5756703 A JPS5756703 A JP S5756703A
Authority
JP
Japan
Prior art keywords
bearing gap
movable member
fluid
housing
measuring interval
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56022334A
Other languages
English (en)
Other versions
JPS6222083B2 (ja
Inventor
Dankushiyatsuto Horumeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DOKUTORU YOHANESU HAIDENHAIN
Dr Johannes Heidenhain GmbH
Original Assignee
DOKUTORU YOHANESU HAIDENHAIN
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DOKUTORU YOHANESU HAIDENHAIN, Dr Johannes Heidenhain GmbH filed Critical DOKUTORU YOHANESU HAIDENHAIN
Publication of JPS5756703A publication Critical patent/JPS5756703A/ja
Publication of JPS6222083B2 publication Critical patent/JPS6222083B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G01D5/34761—Protection devices, e.g. caps; Blowing devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0009—Guiding surfaces; Arrangements compensating for non-linearity there-of
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/02052—Protecting, e.g. shock absorbing, arrangements
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B17/00—Screening
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/02—Air
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S33/00—Geometrical instruments
    • Y10S33/04—Interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP56022334A 1980-02-21 1981-02-19 Length or angle measuring apparatus Granted JPS5756703A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3006489A DE3006489C2 (de) 1980-02-21 1980-02-21 Wegmeßeinrichtung

Publications (2)

Publication Number Publication Date
JPS5756703A true JPS5756703A (en) 1982-04-05
JPS6222083B2 JPS6222083B2 (ja) 1987-05-15

Family

ID=6095188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56022334A Granted JPS5756703A (en) 1980-02-21 1981-02-19 Length or angle measuring apparatus

Country Status (5)

Country Link
US (1) US4377036A (ja)
EP (1) EP0035651B1 (ja)
JP (1) JPS5756703A (ja)
AT (1) ATE15267T1 (ja)
DE (1) DE3006489C2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653620U (ja) * 1992-04-03 1994-07-22 株式会社桂 バリカー
JP2013066952A (ja) * 2011-09-20 2013-04-18 Mitsutoyo Corp 精密移動装置

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585379A (en) * 1980-12-27 1986-04-29 Hitachi, Ltd. Precision positioning device
DE3429644C1 (de) * 1984-08-11 1986-02-13 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmesseinrichtung
DE3429646A1 (de) * 1984-08-11 1986-02-13 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Einrichtung mit einem abgedichteten evakuierten hohlkoerper
US4761876A (en) * 1986-04-18 1988-08-09 Dynamotion Corporation High speed precision drilling system
US4870635A (en) * 1986-09-19 1989-09-26 International Business Machines Corporation Precision measurement and positioning system for disk storage system
US4870271A (en) * 1987-02-06 1989-09-26 Philips Gerald J Method and apparatus for determining the size of defects in rolling element bearings with high frequency capability
JPH0198902A (ja) * 1987-10-12 1989-04-17 Res Dev Corp Of Japan 光波干渉測長装置
US4922307A (en) * 1988-06-30 1990-05-01 Hughes Aircraft Company Method and apparatus for improving the measuring accuracy of a micrometer
US4929082A (en) * 1988-07-13 1990-05-29 Webber Gage Division Of L.S. Laser linear distance measurement system and apparatus
US5127734A (en) * 1990-01-24 1992-07-07 Fuji Photo Optical Co., Ltd. Laser interferometer for inspecting the surface of a specimen
DE4232412A1 (de) * 1992-09-28 1994-03-31 Dietrich Gerhard Ellsaeser Integriertes Holzaufnahmemeßsystem
JPH06194102A (ja) * 1992-12-24 1994-07-15 Mitsutoyo Corp マイクロメータ
US5408318A (en) * 1993-08-02 1995-04-18 Nearfield Systems Incorporated Wide range straightness measuring stem using a polarized multiplexed interferometer and centered shift measurement of beam polarization components
FI1263U1 (fi) * 1993-09-10 1994-03-18 Enfoplan Oy Anordning foer taetning av ett genomfoeringsorgan
US5778016A (en) 1994-04-01 1998-07-07 Imra America, Inc. Scanning temporal ultrafast delay methods and apparatuses therefor
US5585913A (en) * 1994-04-01 1996-12-17 Imra America Inc. Ultrashort pulsewidth laser ranging system employing a time gate producing an autocorrelation and method therefore
US5940180A (en) * 1994-10-11 1999-08-17 Giddings & Lewis Laser interferometer measurement system for use with machine tools
DE19630191C1 (de) * 1996-07-26 1997-10-16 Heidenhain Gmbh Dr Johannes Laser-Interferometer und Verfahren zu dessen Betrieb
DE102005040661B3 (de) * 2005-08-26 2006-12-28 Leica Microsystems Semiconductor Gmbh Koordinatenmessvorrichtung
DE102008048140A1 (de) * 2008-09-20 2010-03-25 Dr. Johannes Heidenhain Gmbh Winkelmesseinrichtung
AT510009B1 (de) * 2011-02-16 2012-01-15 Thomastik Infeld Ges M B H Messvorrichtung und verfahren zur dickenmessung eines bandes

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB876171A (en) * 1956-12-07 1961-08-30 Fairey Co Ltd Improvements relating to bearing arrangements for machine tool and other slides
US3355990A (en) * 1964-08-26 1967-12-05 Henschef Werke A G Hydrostatic positioning of worktables of machine tools
US3393648A (en) * 1965-12-28 1968-07-23 Optomechanisms Inc Air bearing table
DE1548871A1 (de) * 1966-09-10 1969-09-11 Wenczler & Heidenhain Anordnung zum Messen von Laengen
US3640590A (en) * 1968-08-13 1972-02-08 Koning Maschf P Means utilizing compressed air for confining a pressurized oil film between relatively movable bearing surfaces
US3582211A (en) * 1968-10-02 1971-06-01 Doall Co Goniometer
FR2082618A5 (ja) * 1970-03-20 1971-12-10 Thomson Csf
DE2425066C3 (de) * 1974-05-24 1979-04-19 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Optische Meßanordnung
CH602974A5 (ja) * 1974-12-20 1978-08-15 Heidenhain Gmbh Dr Johannes
US4080009A (en) * 1976-09-29 1978-03-21 Giddings & Lewis, Inc. Servostatic bearing system with variable stiffness
DE2727769C2 (de) * 1977-06-21 1979-01-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Gekapselte Längenmeßeinrichtung für große Meßlängen
DE2810341C2 (de) * 1978-03-10 1980-01-31 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653620U (ja) * 1992-04-03 1994-07-22 株式会社桂 バリカー
JP2013066952A (ja) * 2011-09-20 2013-04-18 Mitsutoyo Corp 精密移動装置

Also Published As

Publication number Publication date
EP0035651A2 (de) 1981-09-16
ATE15267T1 (de) 1985-09-15
US4377036A (en) 1983-03-22
JPS6222083B2 (ja) 1987-05-15
DE3006489C2 (de) 1982-09-02
EP0035651B1 (de) 1985-08-28
EP0035651A3 (en) 1982-12-29
DE3006489A1 (de) 1981-08-27

Similar Documents

Publication Publication Date Title
JPS5756703A (en) Length or angle measuring apparatus
FI875333A (fi) Foerfarande och anordning foer applicering och dosering av bestrykningsmedel pao roerligt underlag.
GB2073420A (en) Caliper gauge for the measurement of sheet members over a wide range of thicknesses
BR0015080A (pt) Aparelho para manter um selo de fluido com um substrato móvel
ATE235320T1 (de) Klebstoffauftragsvorrichtung
GR3033163T3 (en) Safety element for a duct
DK104386A (da) Apparat til proevning af beholdere for laekager og defekter
SE8205261D0 (sv) Axeltetning
DK0418946T3 (da) Apparat til aftapning af et fluidum gennem en væg
DE3167067D1 (en) Seal for rotary apparatus for gas-liquid contacting
GB753641A (en) Means for effecting a seal along the interface of two contacting planar surfaces
SE8307019L (sv) Anordning for bestemning och/eller metning av ett arbetsstyckes form
ES528949A0 (es) Un dispositivo detector de fugas de gas desde un recinto que lo contiene, y metodo correspondiente
GB1482098A (en) Thermoforming apparatus
JPS5612245A (en) Noncontact sealing device
FR2580807B1 (fr) Perfectionnements aux dispositifs pour la mesure tres precise des pressions de fluide
GB2062133B (en) Axial sealing device for high fluid pressures
JPS571636A (en) Moving bed equipment
GB1436282A (en) Lubrication systems
GB1221096A (en) Apparatus and method for positioning an elongated member
JPS55155962A (en) Shaft sealing device
GB2009361A (en) Improvements in or relating to hose repair
GB2061410B (en) Fluid seal with lubricated sealing surfaces
ES464620A1 (es) Perfeccionamientos en los transmisores neumaticos de pre- sion.
ES8706558A3 (es) Aparato de manutencion neumatica funcionando de manera continua bajo presiones elevadas