JPS5754309A - Thin magnetic film of oxide - Google Patents

Thin magnetic film of oxide

Info

Publication number
JPS5754309A
JPS5754309A JP13050980A JP13050980A JPS5754309A JP S5754309 A JPS5754309 A JP S5754309A JP 13050980 A JP13050980 A JP 13050980A JP 13050980 A JP13050980 A JP 13050980A JP S5754309 A JPS5754309 A JP S5754309A
Authority
JP
Japan
Prior art keywords
gamma
fe3o4
fe2o3
whose main
main constituent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13050980A
Other languages
Japanese (ja)
Inventor
Masamichi Tagami
Kozo Nishimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP13050980A priority Critical patent/JPS5754309A/en
Publication of JPS5754309A publication Critical patent/JPS5754309A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To improve the preparation efficiency of the film by making on a substrate a film whose main constituent is Fe3O4 through sputtering under the specified condition, by oxidizing the same and by forming thereby the same into a film whose main constituent is gamma-Fe2O3 or gamma-Fe2O3 containing an additive. CONSTITUTION:Through sputtering with Fe3O4 or Fe3O4 containing an additive such as Cu and Co as a target in the range of sputtering pressure wherein the sputtering pressure P of neutral gas or the mixed atmosphere of neutral gas and oxidizing gas and such relations to the maximum value H of a magnetic field leadking on to the surface of the target required for magnetron discharge and being parallel to the surface of the target as P<0.1-3.39X10<-5>H-3.34X10<-7>H<2> Torr and P 1.5X10<-2>-6X10<-5>H+6.444X10<-8>H<2>Torr, a continuous thin film of ferromagnetic oxidized steel whose main constituent is Fe3O4 is formed directly on a substrate, and by oxidizing this thin film, a continuous thin film of ferromagnetic oxidized steel whose main constituent is gamma-Fe2O3 or gamma-Fe2O3 containing the additive is formed. By this constitution, the lowering of the oxidizing temperature, the reduction of the load of the substrate and the improvement of the yield rate and efficiency of preparation can be attained.
JP13050980A 1980-09-19 1980-09-19 Thin magnetic film of oxide Pending JPS5754309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13050980A JPS5754309A (en) 1980-09-19 1980-09-19 Thin magnetic film of oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13050980A JPS5754309A (en) 1980-09-19 1980-09-19 Thin magnetic film of oxide

Publications (1)

Publication Number Publication Date
JPS5754309A true JPS5754309A (en) 1982-03-31

Family

ID=15035978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13050980A Pending JPS5754309A (en) 1980-09-19 1980-09-19 Thin magnetic film of oxide

Country Status (1)

Country Link
JP (1) JPS5754309A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095721A (en) * 1983-10-28 1985-05-29 Hitachi Ltd Vertical magnetic recording medium and its production
JP2018104784A (en) * 2016-12-27 2018-07-05 公益財団法人電磁材料研究所 Iron oxide thin film and method for manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5182000A (en) * 1975-01-16 1976-07-17 Hitachi Ltd KYOJISEISANKATETSUHAKUMAKUNO SEIZOHO
JPS5265897A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxide magnetic thin film

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5182000A (en) * 1975-01-16 1976-07-17 Hitachi Ltd KYOJISEISANKATETSUHAKUMAKUNO SEIZOHO
JPS5265897A (en) * 1975-11-26 1977-05-31 Nippon Telegr & Teleph Corp <Ntt> Preparing oxide magnetic thin film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6095721A (en) * 1983-10-28 1985-05-29 Hitachi Ltd Vertical magnetic recording medium and its production
JP2018104784A (en) * 2016-12-27 2018-07-05 公益財団法人電磁材料研究所 Iron oxide thin film and method for manufacturing the same

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