JPS5752844A - Surface analysis device - Google Patents
Surface analysis deviceInfo
- Publication number
- JPS5752844A JPS5752844A JP55127709A JP12770980A JPS5752844A JP S5752844 A JPS5752844 A JP S5752844A JP 55127709 A JP55127709 A JP 55127709A JP 12770980 A JP12770980 A JP 12770980A JP S5752844 A JPS5752844 A JP S5752844A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- specimen
- manifold
- cathode
- working gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005211 surface analysis Methods 0.000 title 1
- 150000002500 ions Chemical class 0.000 abstract 3
- 238000011109 contamination Methods 0.000 abstract 1
- 230000004927 fusion Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000007935 neutral effect Effects 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Plasma Technology (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55127709A JPS5752844A (en) | 1980-09-13 | 1980-09-13 | Surface analysis device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55127709A JPS5752844A (en) | 1980-09-13 | 1980-09-13 | Surface analysis device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5752844A true JPS5752844A (en) | 1982-03-29 |
| JPH0128455B2 JPH0128455B2 (enrdf_load_stackoverflow) | 1989-06-02 |
Family
ID=14966763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55127709A Granted JPS5752844A (en) | 1980-09-13 | 1980-09-13 | Surface analysis device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5752844A (enrdf_load_stackoverflow) |
-
1980
- 1980-09-13 JP JP55127709A patent/JPS5752844A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0128455B2 (enrdf_load_stackoverflow) | 1989-06-02 |
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