JPS5750445A - Wafer basket conveyor - Google Patents

Wafer basket conveyor

Info

Publication number
JPS5750445A
JPS5750445A JP55126896A JP12689680A JPS5750445A JP S5750445 A JPS5750445 A JP S5750445A JP 55126896 A JP55126896 A JP 55126896A JP 12689680 A JP12689680 A JP 12689680A JP S5750445 A JPS5750445 A JP S5750445A
Authority
JP
Japan
Prior art keywords
basket
wafer
stocker
section
loaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55126896A
Other languages
English (en)
Inventor
Koji Arai
Takeshi Nitsutami
Hideo Suzuki
Mikio Fujii
Fuki Takemata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55126896A priority Critical patent/JPS5750445A/ja
Publication of JPS5750445A publication Critical patent/JPS5750445A/ja
Pending legal-status Critical Current

Links

Classifications

    • H10P72/3311—
    • H10P72/3404—
    • H10P72/3411—
JP55126896A 1980-09-12 1980-09-12 Wafer basket conveyor Pending JPS5750445A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55126896A JPS5750445A (en) 1980-09-12 1980-09-12 Wafer basket conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55126896A JPS5750445A (en) 1980-09-12 1980-09-12 Wafer basket conveyor

Publications (1)

Publication Number Publication Date
JPS5750445A true JPS5750445A (en) 1982-03-24

Family

ID=14946549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55126896A Pending JPS5750445A (en) 1980-09-12 1980-09-12 Wafer basket conveyor

Country Status (1)

Country Link
JP (1) JPS5750445A (ja)

Similar Documents

Publication Publication Date Title
DE3364633D1 (en) Apparatus for and method of serially conveying discrete flexible articles
JPS5352883A (en) Central controlling method for car
JPS5750445A (en) Wafer basket conveyor
US3566891A (en) Tank arrangement
GB1553269A (en) Process control circuits for metal-deposition baths
JPS5719219A (en) Wafer carrier jig conveyor
GB903750A (en) Improvements in or relating to conveying apparatus
JPS57195034A (en) Pallet loading apparatus
JPS6467932A (en) Semiconductor wafer cassette conveyor
JPS6480469A (en) Substrate carrying in/out device of substrate baking device
JPS5380666A (en) Article supplying system to automatic sorting device
JPS6475307A (en) Method of controlling operation of conveying facility in automatic warehouse
EP0132312A3 (en) Method and apparatus for use in production lines
JPS6434804A (en) Automatic warehouse facilities
JPS5247249A (en) Control system for elevator
JPS5767419A (en) Apparatus for transferring material between conveyers
JPS5257657A (en) Convey control system of articles on conveyor
FR2417147A1 (fr) Circuit de commande pour un convoyeur, notamment d'un distributeur automatique de marchandises
GB902918A (en) Improvements in or relating to conveying apparatus
JPS6438305A (en) Method of moving rotary rack
JPS6431431A (en) Conveying method
JPS5731131A (en) Baking method
JPS52150974A (en) Semiconductor wafer treatment apparatus
JPS648112A (en) Control method for rotary shelf
JPS6468933A (en) Apparatus for treating semiconductor-substrate