JPS5750445A - Wafer basket conveyor - Google Patents

Abstract

PURPOSE:To mechanize the operation of carrying in and out of a basket to a diffusion boat, by providing a movable part capable of hanging the wafer basket and movable in three directions: upwards downwards, right wards or left words, and to front and rear of a wafer basket loaded with a wafer and a stocker permitting the indexing of the basket. CONSTITUTION:With a supply command of a basket 13 loaded with a wafer sent by a command from a control panel 22, a right and left travelling section 18 and an upward and downword travelling section 19 provided on a rail 17 move to the proximity of a stocker. A basket holding section 20 moves to reach right above the wafer basket 13 and the basket 13 is released from a lifting step section by the movement of the upward and dounward travelling section 19, the basket 13 is loaded on a diffustion boat 14 by the movement of 18 and 19. Meanwhile, the stocker is rotated for the next basket. Feverse action is done for fetching operation. In this way, the operation of the carrying out of the basket to the diffusion boat and conveyance between each process is mechainzed.