JPS5749249A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS5749249A
JPS5749249A JP55124878A JP12487880A JPS5749249A JP S5749249 A JPS5749249 A JP S5749249A JP 55124878 A JP55124878 A JP 55124878A JP 12487880 A JP12487880 A JP 12487880A JP S5749249 A JPS5749249 A JP S5749249A
Authority
JP
Japan
Prior art keywords
layer
region
type
buried layer
density
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55124878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6225258B2 (enrdf_load_stackoverflow
Inventor
Tadashi Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP55124878A priority Critical patent/JPS5749249A/ja
Publication of JPS5749249A publication Critical patent/JPS5749249A/ja
Publication of JPS6225258B2 publication Critical patent/JPS6225258B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Element Separation (AREA)
JP55124878A 1980-09-09 1980-09-09 Semiconductor integrated circuit device Granted JPS5749249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55124878A JPS5749249A (en) 1980-09-09 1980-09-09 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55124878A JPS5749249A (en) 1980-09-09 1980-09-09 Semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS5749249A true JPS5749249A (en) 1982-03-23
JPS6225258B2 JPS6225258B2 (enrdf_load_stackoverflow) 1987-06-02

Family

ID=14896322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55124878A Granted JPS5749249A (en) 1980-09-09 1980-09-09 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5749249A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150681A (en) * 1974-10-30 1976-05-04 Hitachi Ltd Handotaisochino seizohoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150681A (en) * 1974-10-30 1976-05-04 Hitachi Ltd Handotaisochino seizohoho

Also Published As

Publication number Publication date
JPS6225258B2 (enrdf_load_stackoverflow) 1987-06-02

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