JPS5739198A - Plating apparatus - Google Patents

Plating apparatus

Info

Publication number
JPS5739198A
JPS5739198A JP11430980A JP11430980A JPS5739198A JP S5739198 A JPS5739198 A JP S5739198A JP 11430980 A JP11430980 A JP 11430980A JP 11430980 A JP11430980 A JP 11430980A JP S5739198 A JPS5739198 A JP S5739198A
Authority
JP
Japan
Prior art keywords
plating
current
amplifier
wafer
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11430980A
Other languages
English (en)
Inventor
Kuniyoshi Tamatoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11430980A priority Critical patent/JPS5739198A/ja
Publication of JPS5739198A publication Critical patent/JPS5739198A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
JP11430980A 1980-08-18 1980-08-18 Plating apparatus Pending JPS5739198A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11430980A JPS5739198A (en) 1980-08-18 1980-08-18 Plating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11430980A JPS5739198A (en) 1980-08-18 1980-08-18 Plating apparatus

Publications (1)

Publication Number Publication Date
JPS5739198A true JPS5739198A (en) 1982-03-04

Family

ID=14634635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11430980A Pending JPS5739198A (en) 1980-08-18 1980-08-18 Plating apparatus

Country Status (1)

Country Link
JP (1) JPS5739198A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089215A (ja) * 1983-10-20 1985-05-20 Mitsubishi Electric Corp めつき電流制御回路
JP2007046138A (ja) * 2005-08-12 2007-02-22 Electroplating Eng Of Japan Co ウエーハメッキ用電流分配装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6089215A (ja) * 1983-10-20 1985-05-20 Mitsubishi Electric Corp めつき電流制御回路
JP2007046138A (ja) * 2005-08-12 2007-02-22 Electroplating Eng Of Japan Co ウエーハメッキ用電流分配装置
JP4738094B2 (ja) * 2005-08-12 2011-08-03 日本エレクトロプレイテイング・エンジニヤース株式会社 ウエーハメッキ用電流分配装置

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