JPS5733304A - Method and device for shape inspection - Google Patents

Method and device for shape inspection

Info

Publication number
JPS5733304A
JPS5733304A JP10719380A JP10719380A JPS5733304A JP S5733304 A JPS5733304 A JP S5733304A JP 10719380 A JP10719380 A JP 10719380A JP 10719380 A JP10719380 A JP 10719380A JP S5733304 A JPS5733304 A JP S5733304A
Authority
JP
Japan
Prior art keywords
circuit
light
slit light
accomplished
stable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10719380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS639602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Yoshisada Oshida
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10719380A priority Critical patent/JPS5733304A/ja
Priority to US06/181,768 priority patent/US4343553A/en
Publication of JPS5733304A publication Critical patent/JPS5733304A/ja
Publication of JPS639602B2 publication Critical patent/JPS639602B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10719380A 1979-09-03 1980-08-06 Method and device for shape inspection Granted JPS5733304A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10719380A JPS5733304A (en) 1980-08-06 1980-08-06 Method and device for shape inspection
US06/181,768 US4343553A (en) 1979-09-03 1980-08-27 Shape testing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10719380A JPS5733304A (en) 1980-08-06 1980-08-06 Method and device for shape inspection

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63325766A Division JPH01199102A (ja) 1988-12-26 1988-12-26 立体形状検査装置

Publications (2)

Publication Number Publication Date
JPS5733304A true JPS5733304A (en) 1982-02-23
JPS639602B2 JPS639602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-01

Family

ID=14452825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10719380A Granted JPS5733304A (en) 1979-09-03 1980-08-06 Method and device for shape inspection

Country Status (1)

Country Link
JP (1) JPS5733304A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125547A (ja) * 1983-12-09 1985-07-04 Fujitsu Ltd 検査装置
JPS61162706A (ja) * 1985-01-14 1986-07-23 Hitachi Zosen Corp 立体計測方法
JPS61162705A (ja) * 1985-01-14 1986-07-23 Hitachi Zosen Corp 立体計測方法
DE3540288A1 (de) * 1985-06-21 1987-01-02 Matsushita Electric Works Ltd Anordnung und verfahren zur durchfuehrung von kontrollen an loetstellen
JPS62138709A (ja) * 1985-12-12 1987-06-22 Ono Sokki Co Ltd 変位の測定方法および装置
JPS62249005A (ja) * 1986-04-22 1987-10-30 Bridgestone Corp 物体の形状異常検査装置
JPS6488686A (en) * 1987-09-29 1989-04-03 Fujitsu Ltd Deficient parts inspecting device for packaged parts
JPH02271209A (ja) * 1989-04-13 1990-11-06 Fuamosu:Kk 三次元表面形状判別装置
JP2002107311A (ja) * 2000-09-28 2002-04-10 Mitsubishi Heavy Ind Ltd 実装基板検査装置及び方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530659A (en) * 1978-08-25 1980-03-04 Mitsubishi Electric Corp Parts inspecting device for print substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530659A (en) * 1978-08-25 1980-03-04 Mitsubishi Electric Corp Parts inspecting device for print substrate

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60125547A (ja) * 1983-12-09 1985-07-04 Fujitsu Ltd 検査装置
JPS61162706A (ja) * 1985-01-14 1986-07-23 Hitachi Zosen Corp 立体計測方法
JPS61162705A (ja) * 1985-01-14 1986-07-23 Hitachi Zosen Corp 立体計測方法
DE3540288A1 (de) * 1985-06-21 1987-01-02 Matsushita Electric Works Ltd Anordnung und verfahren zur durchfuehrung von kontrollen an loetstellen
JPS62138709A (ja) * 1985-12-12 1987-06-22 Ono Sokki Co Ltd 変位の測定方法および装置
JPS62249005A (ja) * 1986-04-22 1987-10-30 Bridgestone Corp 物体の形状異常検査装置
JPS6488686A (en) * 1987-09-29 1989-04-03 Fujitsu Ltd Deficient parts inspecting device for packaged parts
JPH02271209A (ja) * 1989-04-13 1990-11-06 Fuamosu:Kk 三次元表面形状判別装置
JP2002107311A (ja) * 2000-09-28 2002-04-10 Mitsubishi Heavy Ind Ltd 実装基板検査装置及び方法

Also Published As

Publication number Publication date
JPS639602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-01

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