JPS5726161A - Manufacturing apparatus for film of very fine particle - Google Patents

Manufacturing apparatus for film of very fine particle

Info

Publication number
JPS5726161A
JPS5726161A JP9922680A JP9922680A JPS5726161A JP S5726161 A JPS5726161 A JP S5726161A JP 9922680 A JP9922680 A JP 9922680A JP 9922680 A JP9922680 A JP 9922680A JP S5726161 A JPS5726161 A JP S5726161A
Authority
JP
Japan
Prior art keywords
tube
substrates
fine particles
vessel
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9922680A
Other languages
English (en)
Other versions
JPS6045270B2 (ja
Inventor
Masahiro Nishikawa
Kuni Ogawa
Atsushi Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9922680A priority Critical patent/JPS6045270B2/ja
Publication of JPS5726161A publication Critical patent/JPS5726161A/ja
Publication of JPS6045270B2 publication Critical patent/JPS6045270B2/ja
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP9922680A 1980-07-18 1980-07-18 超微粒子膜の製造装置 Expired JPS6045270B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9922680A JPS6045270B2 (ja) 1980-07-18 1980-07-18 超微粒子膜の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9922680A JPS6045270B2 (ja) 1980-07-18 1980-07-18 超微粒子膜の製造装置

Publications (2)

Publication Number Publication Date
JPS5726161A true JPS5726161A (en) 1982-02-12
JPS6045270B2 JPS6045270B2 (ja) 1985-10-08

Family

ID=14241743

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9922680A Expired JPS6045270B2 (ja) 1980-07-18 1980-07-18 超微粒子膜の製造装置

Country Status (1)

Country Link
JP (1) JPS6045270B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462209A (en) * 1987-08-31 1989-03-08 Nippon Kokan Kk Manufacture of high strength unequal side and unequal thickness steel shape

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6462209A (en) * 1987-08-31 1989-03-08 Nippon Kokan Kk Manufacture of high strength unequal side and unequal thickness steel shape

Also Published As

Publication number Publication date
JPS6045270B2 (ja) 1985-10-08

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