JPS57210551A - Triple-pole type ion pump - Google Patents

Triple-pole type ion pump

Info

Publication number
JPS57210551A
JPS57210551A JP9484481A JP9484481A JPS57210551A JP S57210551 A JPS57210551 A JP S57210551A JP 9484481 A JP9484481 A JP 9484481A JP 9484481 A JP9484481 A JP 9484481A JP S57210551 A JPS57210551 A JP S57210551A
Authority
JP
Japan
Prior art keywords
cathode
electric discharge
electrode
anode
ion pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9484481A
Other languages
English (en)
Japanese (ja)
Other versions
JPH024979B2 (enrdf_load_html_response
Inventor
Katsuhiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP9484481A priority Critical patent/JPS57210551A/ja
Publication of JPS57210551A publication Critical patent/JPS57210551A/ja
Publication of JPH024979B2 publication Critical patent/JPH024979B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Electron Tubes For Measurement (AREA)
JP9484481A 1981-06-19 1981-06-19 Triple-pole type ion pump Granted JPS57210551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9484481A JPS57210551A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9484481A JPS57210551A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Publications (2)

Publication Number Publication Date
JPS57210551A true JPS57210551A (en) 1982-12-24
JPH024979B2 JPH024979B2 (enrdf_load_html_response) 1990-01-31

Family

ID=14121339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9484481A Granted JPS57210551A (en) 1981-06-19 1981-06-19 Triple-pole type ion pump

Country Status (1)

Country Link
JP (1) JPS57210551A (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222364A (ja) * 1985-07-20 1987-01-30 Anelva Corp スパツタ−イオンポンプ
JPH0568067U (ja) * 1993-02-04 1993-09-10 日電アネルバ株式会社 スパッターイオンポンプ
JP2016146248A (ja) * 2015-02-06 2016-08-12 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
DE112015006910B4 (de) 2015-09-16 2023-03-30 Hitachi High-Tech Corporation Vakuumvorrichtung

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222364A (ja) * 1985-07-20 1987-01-30 Anelva Corp スパツタ−イオンポンプ
JPH0568067U (ja) * 1993-02-04 1993-09-10 日電アネルバ株式会社 スパッターイオンポンプ
JP2016146248A (ja) * 2015-02-06 2016-08-12 株式会社日立製作所 イオンポンプおよびそれを用いた荷電粒子線装置
DE112015006910B4 (de) 2015-09-16 2023-03-30 Hitachi High-Tech Corporation Vakuumvorrichtung

Also Published As

Publication number Publication date
JPH024979B2 (enrdf_load_html_response) 1990-01-31

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