JPS56156660A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS56156660A
JPS56156660A JP6085780A JP6085780A JPS56156660A JP S56156660 A JPS56156660 A JP S56156660A JP 6085780 A JP6085780 A JP 6085780A JP 6085780 A JP6085780 A JP 6085780A JP S56156660 A JPS56156660 A JP S56156660A
Authority
JP
Japan
Prior art keywords
electron
wehnelt electrode
wehnelt
density
projected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6085780A
Other languages
Japanese (ja)
Inventor
Akio Ito
Masaki Yamabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6085780A priority Critical patent/JPS56156660A/en
Publication of JPS56156660A publication Critical patent/JPS56156660A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To secure uniform distribution of the emitted electron and form an efficient crossover, by compensating the differential of electron current density projected on a plane crossing at right angles to the axid of the electron gun. CONSTITUTION:The means of compensating uneven density of a electron beam flux is adopted by reforming an Wehnelt electrode. As the means, for example, a new Wehnelt electrode 4' is constituted by attaching on the outer circle of the small hole 41 rotationally assymmetric projection directed toward the central area of the small hole 41 on the Wehnelt electrode, through a process of welding sticklike auxiliary electrodes or the like, and the projections of the Wehnelt cylinder 4' are arranged so as to oppose to the direction in which the density of projected electron beam is high.
JP6085780A 1980-05-08 1980-05-08 Electron gun Pending JPS56156660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6085780A JPS56156660A (en) 1980-05-08 1980-05-08 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6085780A JPS56156660A (en) 1980-05-08 1980-05-08 Electron gun

Publications (1)

Publication Number Publication Date
JPS56156660A true JPS56156660A (en) 1981-12-03

Family

ID=13154464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6085780A Pending JPS56156660A (en) 1980-05-08 1980-05-08 Electron gun

Country Status (1)

Country Link
JP (1) JPS56156660A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236441A (en) * 1984-05-09 1985-11-25 Jeol Ltd Electron gun

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105098A (en) * 1973-02-13 1974-10-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105098A (en) * 1973-02-13 1974-10-04

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236441A (en) * 1984-05-09 1985-11-25 Jeol Ltd Electron gun

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