JPS57208442A - Humidity detector - Google Patents

Humidity detector

Info

Publication number
JPS57208442A
JPS57208442A JP9467981A JP9467981A JPS57208442A JP S57208442 A JPS57208442 A JP S57208442A JP 9467981 A JP9467981 A JP 9467981A JP 9467981 A JP9467981 A JP 9467981A JP S57208442 A JPS57208442 A JP S57208442A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
heater
hygroscopic
thermoelectromotive force
titanate based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9467981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241702B2 (enrdf_load_stackoverflow
Inventor
Mitsuhiro Murata
Akira Kumada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP9467981A priority Critical patent/JPS57208442A/ja
Publication of JPS57208442A publication Critical patent/JPS57208442A/ja
Publication of JPH0241702B2 publication Critical patent/JPH0241702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP9467981A 1981-06-18 1981-06-18 Humidity detector Granted JPS57208442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9467981A JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9467981A JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Publications (2)

Publication Number Publication Date
JPS57208442A true JPS57208442A (en) 1982-12-21
JPH0241702B2 JPH0241702B2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=14116894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9467981A Granted JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Country Status (1)

Country Link
JP (1) JPS57208442A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5027646A (en) * 1989-07-01 1991-07-02 Ngk Insulators, Ltd. Method of evaluating air-fuel ratio sensor and apparatus therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567883U (enrdf_load_stackoverflow) * 1979-06-29 1981-01-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567883U (enrdf_load_stackoverflow) * 1979-06-29 1981-01-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5027646A (en) * 1989-07-01 1991-07-02 Ngk Insulators, Ltd. Method of evaluating air-fuel ratio sensor and apparatus therefor

Also Published As

Publication number Publication date
JPH0241702B2 (enrdf_load_stackoverflow) 1990-09-19

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