JPH0241702B2 - - Google Patents

Info

Publication number
JPH0241702B2
JPH0241702B2 JP56094679A JP9467981A JPH0241702B2 JP H0241702 B2 JPH0241702 B2 JP H0241702B2 JP 56094679 A JP56094679 A JP 56094679A JP 9467981 A JP9467981 A JP 9467981A JP H0241702 B2 JPH0241702 B2 JP H0241702B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
humidity
heater
output
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56094679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57208442A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9467981A priority Critical patent/JPS57208442A/ja
Publication of JPS57208442A publication Critical patent/JPS57208442A/ja
Publication of JPH0241702B2 publication Critical patent/JPH0241702B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
JP9467981A 1981-06-18 1981-06-18 Humidity detector Granted JPS57208442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9467981A JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9467981A JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Publications (2)

Publication Number Publication Date
JPS57208442A JPS57208442A (en) 1982-12-21
JPH0241702B2 true JPH0241702B2 (enrdf_load_stackoverflow) 1990-09-19

Family

ID=14116894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9467981A Granted JPS57208442A (en) 1981-06-18 1981-06-18 Humidity detector

Country Status (1)

Country Link
JP (1) JPS57208442A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0670619B2 (ja) * 1989-07-01 1994-09-07 日本碍子株式会社 空燃比センサ評価法および装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS567883U (enrdf_load_stackoverflow) * 1979-06-29 1981-01-23

Also Published As

Publication number Publication date
JPS57208442A (en) 1982-12-21

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