JPS57208052A - Observation camera device for electron microscope - Google Patents

Abstract

PURPOSE:To realize a high vacuum of an observation camera device, and enable numbers of photographs to be taken by sealing a vacuumed auxiliary exhaustion chamber, and locating an insertion box, an ejection box, an equipment used for sending cassette packed with films, and the like inside a camera chamber located outside a vacuum chamber. CONSTITUTION:Vacuum exhaustion and air introduction of an auxiliary exhaustion chamber 28 is enabled through an exhaustion hole 27, by means of an exhaustion pipe 34 provided with a switching valve 33 connected to both an air introducing pipe 31 and a vacuum exhaustion pipe 32. A sliding shaft 42, which is used for taking cassettes 29 out of an insertion box 31 one by one, moving each cassette 29 to a photographic position located under an electron-ray path by sending it on a guide rail 41, and installing the cassettes 29 in an ejection box 40 after the photographic performances, is fitted inside a camera chamber 35. In addition, the chamber 35 contains both a lock shaft 44 used for moving the cassette 29 in the upward and downward directions relative to the guide rail 41 by holding the cassette 29 with a joined base body 43 continuous with the shaft 44, and a light shielding lid 45 used for taking in and out the insertion box 39 or the ejection box 40.