JPS5720770A - Apparatus and method for development - Google Patents

Apparatus and method for development

Info

Publication number
JPS5720770A
JPS5720770A JP9613380A JP9613380A JPS5720770A JP S5720770 A JPS5720770 A JP S5720770A JP 9613380 A JP9613380 A JP 9613380A JP 9613380 A JP9613380 A JP 9613380A JP S5720770 A JPS5720770 A JP S5720770A
Authority
JP
Japan
Prior art keywords
cup
developer
holes
development
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9613380A
Other languages
Japanese (ja)
Inventor
Atsushi Ueno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9613380A priority Critical patent/JPS5720770A/en
Publication of JPS5720770A publication Critical patent/JPS5720770A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00—Apparatus for electrographic processes using a charge pattern
    • G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
    • G03G15/10—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer
    • G03G15/101—Apparatus for electrographic processes using a charge pattern for developing using a liquid developer for wetting the recording material

Abstract

PURPOSE:To improve the uniformity of the development of positive resist by providing a cylindrical cup having plural holes on the side face of the rotating shaft of a spinner and dropping a developer from the holes through storing semiconductor wafers in the cup. CONSTITUTION:A cup 10 having plural holes on the side face are provided to the rotating shaft 1 of a spinner and silicone wafers 3 coated with poritive resist 4 are set inside the cup. When the cup is rotated at the rotational speed of several tens to hundreds rpm and the developer 6 is dropped from a nozzle 5 intermittently, some volume of developer stays in the cup 10 and the positive resist 4 flows from the holes 11 together with the developer 6. After dropping water as a rinsing solution, the cup is rotated at a high speed to dry the contents. Thus, uniform development is made available by dipping development.
JP9613380A 1980-07-14 1980-07-14 Apparatus and method for development Pending JPS5720770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9613380A JPS5720770A (en) 1980-07-14 1980-07-14 Apparatus and method for development

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9613380A JPS5720770A (en) 1980-07-14 1980-07-14 Apparatus and method for development

Publications (1)

Publication Number Publication Date
JPS5720770A true JPS5720770A (en) 1982-02-03

Family

ID=14156886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9613380A Pending JPS5720770A (en) 1980-07-14 1980-07-14 Apparatus and method for development

Country Status (1)

Country Link
JP (1) JPS5720770A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393416A (en) * 1989-09-06 1991-04-18 Terada Denki Seisakusho:Kk Floor wiring structure
JPH0383422U (en) * 1989-12-15 1991-08-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393416A (en) * 1989-09-06 1991-04-18 Terada Denki Seisakusho:Kk Floor wiring structure
JPH0383422U (en) * 1989-12-15 1991-08-26

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