JPS57206807A - Detecting method for profile point of curve surface - Google Patents

Detecting method for profile point of curve surface

Info

Publication number
JPS57206807A
JPS57206807A JP9104181A JP9104181A JPS57206807A JP S57206807 A JPS57206807 A JP S57206807A JP 9104181 A JP9104181 A JP 9104181A JP 9104181 A JP9104181 A JP 9104181A JP S57206807 A JPS57206807 A JP S57206807A
Authority
JP
Japan
Prior art keywords
light
plane
curve surface
tested
inspecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9104181A
Other languages
English (en)
Inventor
Yoshiaki Otsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP9104181A priority Critical patent/JPS57206807A/ja
Publication of JPS57206807A publication Critical patent/JPS57206807A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP9104181A 1981-06-13 1981-06-13 Detecting method for profile point of curve surface Pending JPS57206807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9104181A JPS57206807A (en) 1981-06-13 1981-06-13 Detecting method for profile point of curve surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9104181A JPS57206807A (en) 1981-06-13 1981-06-13 Detecting method for profile point of curve surface

Publications (1)

Publication Number Publication Date
JPS57206807A true JPS57206807A (en) 1982-12-18

Family

ID=14015411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9104181A Pending JPS57206807A (en) 1981-06-13 1981-06-13 Detecting method for profile point of curve surface

Country Status (1)

Country Link
JP (1) JPS57206807A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61149808U (ja) * 1985-03-11 1986-09-16
JPH0310249U (ja) * 1989-06-19 1991-01-31

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528884A (en) * 1975-07-11 1977-01-24 Toyo Kohan Co Ltd No reflow detector unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS528884A (en) * 1975-07-11 1977-01-24 Toyo Kohan Co Ltd No reflow detector unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61149808U (ja) * 1985-03-11 1986-09-16
JPH0310249U (ja) * 1989-06-19 1991-01-31

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