JPS57196465A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS57196465A
JPS57196465A JP56081437A JP8143781A JPS57196465A JP S57196465 A JPS57196465 A JP S57196465A JP 56081437 A JP56081437 A JP 56081437A JP 8143781 A JP8143781 A JP 8143781A JP S57196465 A JPS57196465 A JP S57196465A
Authority
JP
Japan
Prior art keywords
sample
scanning
output
generating circuit
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56081437A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hironobu Moriwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP56081437A priority Critical patent/JPS57196465A/ja
Publication of JPS57196465A publication Critical patent/JPS57196465A/ja
Publication of JPS631700B2 publication Critical patent/JPS631700B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56081437A 1981-05-28 1981-05-28 Scanning electron microscope Granted JPS57196465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56081437A JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56081437A JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS57196465A true JPS57196465A (en) 1982-12-02
JPS631700B2 JPS631700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-13

Family

ID=13746366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56081437A Granted JPS57196465A (en) 1981-05-28 1981-05-28 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57196465A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182371A (ja) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan スキャンライン型動的観察装置
JPS60195860A (ja) * 1984-03-16 1985-10-04 Res Dev Corp Of Japan 動的観察表示装置
JPS61109252A (ja) * 1984-10-31 1986-05-27 Shimadzu Corp 表面分析装置
JPH053141U (ja) * 1991-06-27 1993-01-19 益弘 光山 袋の支持具
JPH0676201U (ja) * 1993-03-31 1994-10-28 久雄 下山 使い捨て組立ごみ袋

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02122893A (ja) * 1988-10-31 1990-05-10 Meidensha Corp 嫌気処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623477U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-08-01 1981-03-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623477U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-08-01 1981-03-03

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59182371A (ja) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan スキャンライン型動的観察装置
JPS60195860A (ja) * 1984-03-16 1985-10-04 Res Dev Corp Of Japan 動的観察表示装置
JPS61109252A (ja) * 1984-10-31 1986-05-27 Shimadzu Corp 表面分析装置
JPH053141U (ja) * 1991-06-27 1993-01-19 益弘 光山 袋の支持具
JPH0676201U (ja) * 1993-03-31 1994-10-28 久雄 下山 使い捨て組立ごみ袋

Also Published As

Publication number Publication date
JPS631700B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-01-13

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