JPS57196444A - Electron beam emission device - Google Patents

Electron beam emission device

Info

Publication number
JPS57196444A
JPS57196444A JP6265882A JP6265882A JPS57196444A JP S57196444 A JPS57196444 A JP S57196444A JP 6265882 A JP6265882 A JP 6265882A JP 6265882 A JP6265882 A JP 6265882A JP S57196444 A JPS57196444 A JP S57196444A
Authority
JP
Japan
Prior art keywords
electron beam
emission device
beam emission
electron
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6265882A
Other languages
English (en)
Inventor
Hoon Furitsutsuuyurugen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS57196444A publication Critical patent/JPS57196444A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape

Landscapes

  • Solid Thermionic Cathode (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electron Sources, Ion Sources (AREA)
JP6265882A 1981-05-26 1982-04-16 Electron beam emission device Pending JPS57196444A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/267,319 US4486684A (en) 1981-05-26 1981-05-26 Single crystal lanthanum hexaboride electron beam emitter having high brightness

Publications (1)

Publication Number Publication Date
JPS57196444A true JPS57196444A (en) 1982-12-02

Family

ID=23018278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6265882A Pending JPS57196444A (en) 1981-05-26 1982-04-16 Electron beam emission device

Country Status (4)

Country Link
US (1) US4486684A (ja)
EP (1) EP0066080B1 (ja)
JP (1) JPS57196444A (ja)
DE (1) DE3267247D1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183245U (ja) * 1984-11-08 1986-06-02
JPH10106926A (ja) * 1996-10-01 1998-04-24 Nikon Corp 荷電粒子線リソグラフィ装置、荷電粒子線リソグラフィ装置の評価方法およびパターン形成方法
WO2018016286A1 (ja) * 2016-07-19 2018-01-25 デンカ株式会社 電子源およびその製造方法

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4994706A (en) * 1987-02-02 1991-02-19 The United States Of America As Represented By The United States Department Of Energy Field free, directly heated lanthanum boride cathode
US4795940A (en) * 1987-10-14 1989-01-03 The United States Of America As Represented By The United States Department Of Energy Large area directly heated lanthanum hexaboride cathode structure having predetermined emission profile
US5483062A (en) * 1994-01-21 1996-01-09 Merrill Corporation Photon detector based upon an activated lanthanide beryllate scintillator
US6252339B1 (en) 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
KR20060011665A (ko) * 2004-07-30 2006-02-03 삼성에스디아이 주식회사 전자 방출 소자와 이의 제조 방법
US9240301B1 (en) * 2012-03-27 2016-01-19 Applied Physics Technologies, Inc. Thermal-field type electron source composed of transition metal carbide material with artificial facet
WO2014007121A1 (ja) 2012-07-03 2014-01-09 独立行政法人物質・材料研究機構 六ホウ化金属冷電界エミッター、その製造方法及び電子銃
JP6266458B2 (ja) * 2013-08-09 2018-01-24 株式会社日立ハイテクサイエンス イリジウムティップ、ガス電界電離イオン源、集束イオンビーム装置、電子源、電子顕微鏡、電子ビーム応用分析装置、イオン電子複合ビーム装置、走査プローブ顕微鏡、およびマスク修正装置
US10083812B1 (en) 2015-12-04 2018-09-25 Applied Physics Technologies, Inc. Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form
US9697983B1 (en) * 2016-02-29 2017-07-04 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Thermal field emitter tip, electron beam device including a thermal field emitter tip and method for operating an electron beam device
CN112447467B (zh) * 2020-10-28 2022-09-13 湖南稀土金属材料研究院 LaB6场发射阵列薄膜阴极的制备方法及应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630231A (en) * 1979-08-20 1981-03-26 Denki Kagaku Kogyo Kk Thermoelectron radiating cathode
JPS5648029A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1210007A (en) * 1968-07-05 1970-10-28 Mullard Ltd Cathode
US3631290A (en) * 1970-08-17 1971-12-28 Ibm Thermionic cathode for electron beam apparatus
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
JPS5728177B2 (ja) * 1974-10-07 1982-06-15
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
JPS5231650A (en) * 1975-09-04 1977-03-10 Natl Inst For Res In Inorg Mater Thermion radiation cathode
JPS5230151A (en) * 1975-09-03 1977-03-07 Hitachi Ltd Electric fieled radiation-type cold cathode
US4054946A (en) * 1976-09-28 1977-10-18 Bell Telephone Laboratories, Incorporated Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane
JPS5812695B2 (ja) * 1977-09-30 1983-03-09 電気化学工業株式会社 熱電子放射陰極の製造法
JPS5524371A (en) * 1978-08-10 1980-02-21 Denki Kagaku Kogyo Kk Thermionic cathode
JPS5630465A (en) * 1979-08-21 1981-03-27 Fuji Photo Film Co Ltd 2,6-di-t-butyl-4- 3- 2,6-di-t-butyl-4h-thiopyran-4-ylidene propen-1-yl thiopyrylium salt and production thereof
JPS5648028A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun
JPS5679828A (en) * 1979-12-05 1981-06-30 Toshiba Corp Electron gun
JPS5684842A (en) * 1979-12-13 1981-07-10 Denki Kagaku Kogyo Kk Thermion-discharging cathode
JPS5693244A (en) * 1979-12-26 1981-07-28 Toshiba Corp Electron gun

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630231A (en) * 1979-08-20 1981-03-26 Denki Kagaku Kogyo Kk Thermoelectron radiating cathode
JPS5648029A (en) * 1979-09-26 1981-05-01 Toshiba Corp Electron gun

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183245U (ja) * 1984-11-08 1986-06-02
JPH0238365Y2 (ja) * 1984-11-08 1990-10-16
JPH10106926A (ja) * 1996-10-01 1998-04-24 Nikon Corp 荷電粒子線リソグラフィ装置、荷電粒子線リソグラフィ装置の評価方法およびパターン形成方法
WO2018016286A1 (ja) * 2016-07-19 2018-01-25 デンカ株式会社 電子源およびその製造方法
JPWO2018016286A1 (ja) * 2016-07-19 2019-05-09 デンカ株式会社 電子源およびその製造方法
US10553390B2 (en) 2016-07-19 2020-02-04 Denka Company Limited Electron source and production method therefor
US10957511B2 (en) 2016-07-19 2021-03-23 Denka Company Limited Electron source and production method therefor
US11152185B2 (en) 2016-07-19 2021-10-19 Denka Company Limited Electron source and production method therefor

Also Published As

Publication number Publication date
EP0066080B1 (en) 1985-11-06
US4486684A (en) 1984-12-04
EP0066080A1 (en) 1982-12-08
DE3267247D1 (en) 1985-12-12

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