JPS5719607A - Device for measuring thickness of dielectric film - Google Patents

Device for measuring thickness of dielectric film

Info

Publication number
JPS5719607A
JPS5719607A JP9533980A JP9533980A JPS5719607A JP S5719607 A JPS5719607 A JP S5719607A JP 9533980 A JP9533980 A JP 9533980A JP 9533980 A JP9533980 A JP 9533980A JP S5719607 A JPS5719607 A JP S5719607A
Authority
JP
Japan
Prior art keywords
semiconductor laser
dielectric film
laser element
plane mirror
terminal voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9533980A
Other languages
Japanese (ja)
Inventor
Jun Osawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9533980A priority Critical patent/JPS5719607A/en
Publication of JPS5719607A publication Critical patent/JPS5719607A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To obtain a simple and convenient structure wherein a specimen cna be set very easily, by sensing the thickness of the dielectric film to be grown on a member having a reflecting surface as the magnitude of the terminal voltage of a semiconductor laser element. CONSTITUTION:A self-combining type semiconductor laser 10 is constituted by the semiconductor laser element 7, a lens 8 for forming parallel beams, and a plane mirror 9 facing the beams at a right angle and having a suitable reflectivity. The dielectric film 2 is formed on the plane mirror 9. The light irradiated from the semiconductor element 7 is reflected by the plane mirror 9, and returned to the light emitting part of the semiconductor laser element 7. The optical density in th active regiob in the semiconductor laser element 7 is varied, and the terminal voltage of the semiconductor laser element 7 is also varied. Therefore the variation in the reflectivity of the plane mirror 9 is sensed as the variation in the terminal voltage of the semiconductor laser element 7. Since the reflectivity of the plane mirror 9 varies with the thcikness of the dielectric film 2, the thickness of the dielectric film 2 can be monitored.
JP9533980A 1980-07-10 1980-07-10 Device for measuring thickness of dielectric film Pending JPS5719607A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9533980A JPS5719607A (en) 1980-07-10 1980-07-10 Device for measuring thickness of dielectric film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9533980A JPS5719607A (en) 1980-07-10 1980-07-10 Device for measuring thickness of dielectric film

Publications (1)

Publication Number Publication Date
JPS5719607A true JPS5719607A (en) 1982-02-01

Family

ID=14134936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9533980A Pending JPS5719607A (en) 1980-07-10 1980-07-10 Device for measuring thickness of dielectric film

Country Status (1)

Country Link
JP (1) JPS5719607A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107806834A (en) * 2016-09-09 2018-03-16 中微半导体设备(上海)有限公司 A kind of multi-wavelength optical measurement apparatus and its measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107806834A (en) * 2016-09-09 2018-03-16 中微半导体设备(上海)有限公司 A kind of multi-wavelength optical measurement apparatus and its measuring method

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