JPS571957A - Device for limiting charge on surface of solid - Google Patents
Device for limiting charge on surface of solidInfo
- Publication number
- JPS571957A JPS571957A JP7589480A JP7589480A JPS571957A JP S571957 A JPS571957 A JP S571957A JP 7589480 A JP7589480 A JP 7589480A JP 7589480 A JP7589480 A JP 7589480A JP S571957 A JPS571957 A JP S571957A
- Authority
- JP
- Japan
- Prior art keywords
- specimen
- circuit
- charge
- low speed
- gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7589480A JPS571957A (en) | 1980-06-04 | 1980-06-04 | Device for limiting charge on surface of solid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7589480A JPS571957A (en) | 1980-06-04 | 1980-06-04 | Device for limiting charge on surface of solid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS571957A true JPS571957A (en) | 1982-01-07 |
Family
ID=13589476
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7589480A Pending JPS571957A (en) | 1980-06-04 | 1980-06-04 | Device for limiting charge on surface of solid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS571957A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2762182A1 (fr) * | 1997-04-11 | 1998-10-16 | Hitachi Ltd | Procede pour empecher l'accumulation d'une charge et dispositif d'implantation ionique |
-
1980
- 1980-06-04 JP JP7589480A patent/JPS571957A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2762182A1 (fr) * | 1997-04-11 | 1998-10-16 | Hitachi Ltd | Procede pour empecher l'accumulation d'une charge et dispositif d'implantation ionique |
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