JPS57195745A - Sealing device in continuous vacuum treatment apparatus - Google Patents

Sealing device in continuous vacuum treatment apparatus

Info

Publication number
JPS57195745A
JPS57195745A JP8089981A JP8089981A JPS57195745A JP S57195745 A JPS57195745 A JP S57195745A JP 8089981 A JP8089981 A JP 8089981A JP 8089981 A JP8089981 A JP 8089981A JP S57195745 A JPS57195745 A JP S57195745A
Authority
JP
Japan
Prior art keywords
sealing device
roll
seal
elastomer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8089981A
Other languages
Japanese (ja)
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8089981A priority Critical patent/JPS57195745A/en
Publication of JPS57195745A publication Critical patent/JPS57195745A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physical Vapour Deposition (AREA)
  • Rolls And Other Rotary Bodies (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE:To improve service durability of seal roll, side seal and ripple member constituting a sealing device for preliminary vacuum chamber, by using a metal roll covered with an elastomer and a slightly flexible rigid substance. CONSTITUTION:The sealing device consists of a pair of seal rolls 16, 17 and ripple members 19 affixed in the axial direction on both sides of the seal rolls (F indicates workpiece such as plastic film). The upper seal roll 16 is made of metal and is covered on the whole outer peripheral area with an elastomer 21 (e.g. silicone rubber) and a thin-walled and elastically deformable metal pipe 22 is attached a round it except the edge portions of the roll. This frictional force is lowered at the chafing parts and service durability of the sealing device is improved.
JP8089981A 1981-05-29 1981-05-29 Sealing device in continuous vacuum treatment apparatus Pending JPS57195745A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8089981A JPS57195745A (en) 1981-05-29 1981-05-29 Sealing device in continuous vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8089981A JPS57195745A (en) 1981-05-29 1981-05-29 Sealing device in continuous vacuum treatment apparatus

Publications (1)

Publication Number Publication Date
JPS57195745A true JPS57195745A (en) 1982-12-01

Family

ID=13731205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8089981A Pending JPS57195745A (en) 1981-05-29 1981-05-29 Sealing device in continuous vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195745A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60942A (en) * 1983-06-17 1985-01-07 Hitachi Ltd Continuous vacuum treatment device
JPS60944A (en) * 1983-06-17 1985-01-07 Hitachi Ltd Continuous vacuum treatment device
EP2520405A1 (en) * 2011-05-03 2012-11-07 Maschinenbau Scholz Gmbh & Co. Kg Variable seal for CV tube

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60942A (en) * 1983-06-17 1985-01-07 Hitachi Ltd Continuous vacuum treatment device
JPS60944A (en) * 1983-06-17 1985-01-07 Hitachi Ltd Continuous vacuum treatment device
JPH0455214B2 (en) * 1983-06-17 1992-09-02 Hitachi Seisakusho Kk
EP2520405A1 (en) * 2011-05-03 2012-11-07 Maschinenbau Scholz Gmbh & Co. Kg Variable seal for CV tube

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