JPH0455214B2 - - Google Patents
Info
- Publication number
- JPH0455214B2 JPH0455214B2 JP58107873A JP10787383A JPH0455214B2 JP H0455214 B2 JPH0455214 B2 JP H0455214B2 JP 58107873 A JP58107873 A JP 58107873A JP 10787383 A JP10787383 A JP 10787383A JP H0455214 B2 JPH0455214 B2 JP H0455214B2
- Authority
- JP
- Japan
- Prior art keywords
- seal
- vacuum
- roll
- sealing
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007789 sealing Methods 0.000 claims description 21
- 238000004804 winding Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は可撓性の被処理物、例えばプラスチツ
ク成形品を真空処理室内で連続的に表面処理をす
る真空連続処理装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a continuous vacuum processing apparatus for continuously surface-treating flexible objects, such as plastic molded products, in a vacuum processing chamber.
従来、プラスチツク成形品など可撓性の被処理
物を真空処理室内で連続的に表面処理するもの
に、特開昭57−195745号公報に記載のように真空
処理室の側方に予備真空室が段階的に真空度を下
げるために設けられたものがあり、この予備真空
室は、被処理室の搬送方向に並置するシールロー
ルと、このシールロールを囲むケースと、このケ
ースと前記シールロールとの間をシールし、かつ
支持部材に一体的に取付けられたシール部材を備
えている。
Conventionally, when a flexible workpiece such as a plastic molded product is subjected to continuous surface treatment in a vacuum processing chamber, a preliminary vacuum chamber is installed on the side of the vacuum processing chamber as described in Japanese Patent Application Laid-open No. 195745/1983. This pre-vacuum chamber consists of a seal roll juxtaposed in the transport direction of the processing chamber, a case surrounding the seal roll, and a case and the seal roll arranged side by side in the conveyance direction of the processing chamber. and a seal member integrally attached to the support member.
また、特開昭57−73025号公報記載のように、
大気側と真空側との圧力差により、シール部材の
押付量が変化するようにしたものがある。 Also, as described in Japanese Patent Application Laid-Open No. 57-73025,
There is one in which the amount of pressing of the sealing member changes depending on the pressure difference between the atmospheric side and the vacuum side.
しかしながら、特開昭57−195745号公報記載の
シール部材は、シールロールとの押付量の調整を
行う場合には、その都度、ケースを分解して行う
必要があつた。このため、作業能率が悪かつた。
また、シール部材が取外し自在な構造でなく、こ
のため摩耗して取換える必要が生じた場合にも上
記と同様の問題を有していた。また、特開昭57−
73025号公報記載のものでは、圧力差が小さいと
きはシールが不充分となるという問題があつた。
However, in the case of the sealing member described in JP-A-57-195745, it was necessary to disassemble the case each time the amount of pressure applied to the sealing roll was adjusted. As a result, work efficiency was poor.
Further, the sealing member is not designed to be removable, and therefore, when it wears out and needs to be replaced, the same problem as above occurs. Also, JP-A-57-
The method described in Publication No. 73025 had a problem in that the sealing was insufficient when the pressure difference was small.
本発明の目的は、シール部材の押付量が圧力差
とは無関係に調整自在な、また取外し（交換）
が、自在な真空連続処理装置を提供することにあ
る。 The purpose of the present invention is to enable the pressing amount of the sealing member to be freely adjusted regardless of the pressure difference, and to enable easy removal (replacement).
However, the object of the present invention is to provide a flexible continuous vacuum processing device.
上記目的は、真空処理室の側方に配置する予備
真空室と、この予備真空室内に相隣接して被処理
物を搬送するシールロールと、このシールロール
を囲むケースと、このケースと前記シールロール
との間をシールするシール部材とを備える真空連
続処理装置において、前記シール部材をケースに
対して移動可能に取付けることによつて、このシ
ール部材の前記シールロール方向への取付位置を
調整可能にし、前記シール部材のシールロールに
対する押付量を調整自在にすることによつて、達
成される。
The above purpose is to provide a preliminary vacuum chamber disposed on the side of the vacuum processing chamber, a seal roll adjacent to the preliminary vacuum chamber for conveying the workpiece, a case surrounding the seal roll, and a case and the seal. In a vacuum continuous processing apparatus equipped with a sealing member that seals between the sealing member and the roll, the mounting position of the sealing member in the direction of the sealing roll can be adjusted by attaching the sealing member movably with respect to the case. This is achieved by making the amount of pressing of the seal member against the seal roll adjustable.
また上記目的は、前記シール部材をケースに対
して移動可能に取り付けることによつて、このシ
ール部材の前記シールロール方向への取付位置を
調整可能にし、前記シール部材のシールロールに
対する押付量を調整自在にすると共に取外し自在
に取付けることによつて、達成される。 Further, the above object is to make it possible to adjust the mounting position of the seal member in the direction of the seal roll by attaching the seal member movably with respect to the case, and to adjust the amount of pressing of the seal member against the seal roll. This is achieved by making it both flexible and removable.
シール部材が摩耗した場合、シール部材をケー
スに対して上下方向又は横方向が移動して取付位
置を調整し、また摩耗量の大きいときは取外して
交換する。
When the seal member is worn, the seal member is moved vertically or laterally with respect to the case to adjust the mounting position, and when the amount of wear is large, it is removed and replaced.
以下本発明の一実施例をプラズマ処理装置に適
用した場合の実施例について図面により説明す
る。
DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment in which an embodiment of the present invention is applied to a plasma processing apparatus will be described below with reference to the drawings.
第１図および第２図において、１はプラスチツ
クフイルム例えば塩化ビニール系樹脂フイルムの
ように可撓性の被処理物Ｆを真空状態で連続的に
プラズマ処理する真空処理室、２は真空処理室１
の前方側に複数個配置される予備真空室、３は真
空処理室１の後方側に複数個配置される予備真空
室で、前記真空処理室１内はこれに接続する真空
ポンプ４により10-2トール程度の真空圧力に保持
するように排気管５を介して真空排気される。 1 and 2, 1 is a vacuum processing chamber in which a flexible workpiece F, such as a plastic film, for example, a vinyl chloride resin film, is subjected to continuous plasma treatment in a vacuum state; 2 is a vacuum processing chamber 1;
A plurality of preliminary vacuum chambers 3 are arranged on the front side of the vacuum processing chamber 1, and a plurality of preliminary vacuum chambers 3 are arranged on the rear side of the vacuum processing chamber 1 . It is evacuated via an exhaust pipe 5 to maintain a vacuum pressure of about 2 torr.
前記予備真空室２，３内はこれに接続する真空
ポンプ６により前記真空処理室１内の真空圧力に
より若干高く、かつ大気圧より段階的に減じる真
空圧力に保持するように排気管７を介して真空排
気される。 The inside of the preliminary vacuum chambers 2 and 3 is maintained at a vacuum pressure that is slightly higher than the vacuum pressure in the vacuum processing chamber 1 and gradually lowered from atmospheric pressure by a vacuum pump 6 connected thereto through an exhaust pipe 7. and evacuated.
処理される被処理物Ｆは巻出装置８より前方側
の予備真空室２を経て真空処理室１へ送られ、そ
こでプラズマ処理された後、さらに後方側の予備
真空室３を経て巻取装置９で巻取られる。１０は
駆動用モータで、この駆動用モータ１０はライン
シヤフト１１および無段変速機１２，１３，１
４，１５を介して真空処理室１、予備真空室２，
３、巻取装置９へ駆動力を伝達し、真空処理室
１、予備真空室２，３および巻取装置９の各駆動
系の回転速度は前記無段変速機１２，１３，１
４，１５により適宜調整される。 The workpiece F to be processed is sent from the unwinding device 8 through the preliminary vacuum chamber 2 on the front side to the vacuum processing chamber 1, where it is subjected to plasma treatment, and then further passed through the preliminary vacuum chamber 3 on the rear side to the winding device. It is wound up at 9. 10 is a drive motor, and this drive motor 10 is connected to a line shaft 11 and continuously variable transmissions 12, 13, 1.
4, 15 to the vacuum processing chamber 1, preliminary vacuum chamber 2,
3. The driving force is transmitted to the winding device 9, and the rotational speed of each drive system of the vacuum processing chamber 1, the preliminary vacuum chambers 2, 3, and the winding device 9 is controlled by the continuously variable transmission 12, 13, 1.
4 and 15 as appropriate.
第３図及び第４図は前記予備真空室２，３の主
要部を示すもので、上シールロール１６は表面に
ゴムなどの弾性材１８が一体的に焼着されてお
り、下シールロール１７は表面に硬質のクロムニ
ツケル層が施されている。１９，２０はケース２
１にボルトなどにより支持部材２２，２３を介し
て取外し自在（容易）に支持され、かつ上下シー
ルロール１６，１７の上下方向の外周面に対する
部材で、このシール部材１９，２０は前記ケース
２１に対して移動可能（例えばボルトの締付量調
整、座金の調整）に取付けることによつてこのシ
ール部材１９，２０の前記シールロール１６，１
７方向への取付位置を調整自在にし、前記シール
部材１９，２０のシールロール１６，１７に対し
て押付量を調整自在にしている。２４，２５は上
下シールロール１６，１７の両端側に接するサイ
ドピースで、このサイドピース２４，２５はシー
ル１６，１７と接する側にはフツソ樹脂膜２７が
焼着されており、このサイドピース２４，２５は
軸受ハウジング２８を介して支持されている。 3 and 4 show the main parts of the preliminary vacuum chambers 2 and 3. The upper seal roll 16 has an elastic material 18 such as rubber baked on its surface, and the lower seal roll 17 has a hard chrome-nickel layer on its surface. 19 and 20 are case 2
1 is removably (easily) supported by bolts or the like via support members 22, 23, and is a member for the vertical outer peripheral surfaces of the upper and lower seal rolls 16, 17. These seal members 19, 20 are attached to the case 21. By attaching the seal members 19, 20 so as to be movable (for example, adjusting the tightening amount of bolts, adjusting the washer), the seal rolls 16, 1 of the seal members 19, 20
The mounting position in seven directions is adjustable, and the amount of pressure of the seal members 19, 20 against the seal rolls 16, 17 is adjustable. Reference numerals 24 and 25 denote side pieces that are in contact with both ends of the upper and lower seal rolls 16 and 17, and the sides of these side pieces 24 and 25 that are in contact with the seals 16 and 17 are baked with a soft resin film 27. , 25 are supported via a bearing housing 28.
このようにシール部材１９，２０をケース２１
に対して移動可能に取付けることによつてシール
部材１９，２０が摩耗した場合には、支持部材２
２，２３をケース２１に対して下方又は上方へ移
動してその取付位置を調整するか、摩耗量が大き
いときはシール部材１９，２０をケース２１から
取外して交換する。 In this way, the seal members 19 and 20 are attached to the case 21.
If the seal members 19, 20 are worn out due to being movably attached to the supporting member 2,
Either move the seal members 2 and 23 downward or upward with respect to the case 21 to adjust their mounting positions, or if the amount of wear is large, remove the seal members 19 and 20 from the case 21 and replace them.
第５図は本発明の他の実施例を示すもので、上
シール部材１９を上シールロール１６の横方向に
配置したものである。 FIG. 5 shows another embodiment of the present invention, in which an upper seal member 19 is disposed in the lateral direction of the upper seal roll 16.
このようにシール部材を配設することにより、
シール部材の取付位置の調整が可能となると共
に、取外しがさらに容易になる。 By arranging the seal member in this way,
It becomes possible to adjust the mounting position of the seal member, and it becomes easier to remove the seal member.
また、被処理物Ｆが厚くなり、上シールロール
１６を上方向へ移動した場合でもシール部材１９
はシールロール１６に接触する恐れがないため、
シール部材１９の破損や上下シールロールとケー
スとの軸方向のシール性の低下を防止することが
できる。 Furthermore, even if the object to be processed F becomes thick and the upper seal roll 16 is moved upward, the seal member 19
Since there is no risk of contacting the seal roll 16,
It is possible to prevent damage to the seal member 19 and a decrease in sealing performance in the axial direction between the upper and lower seal rolls and the case.
なお、上記実施例は２個の相隣接するシールロ
ールの場合について説明してあるが、シールロー
ルを例えば３本を隣接させたものでも同様にして
実施することができる。 Although the above embodiment describes the case of two adjacent seal rolls, it is also possible to implement the same method using, for example, three seal rolls adjacent to each other.
本発明によれば、シール部材の交換が容易にで
き、またシール部材のシールロール方向への押付
量調整が自在な真空連続処理装置が得られる。
According to the present invention, it is possible to obtain a continuous vacuum processing apparatus in which the sealing member can be easily replaced and the amount of pressing of the sealing member in the seal roll direction can be freely adjusted.
第１図および第２図は本発明の真空連続処理装
置の一実施例を示すもので、第１図は正面図、第
２図は第１図の平面図、第３図は本発明装置にお
ける予備真空室の要部を示す拡大図、第４図は第
３図の４−４の線矢視図、第５図は本発明装置に
おける他の実施例を示し、第４図に相当する図で
ある。
１……真空処理室、２，３……予備真空室、１
９，２０……シール部材。
1 and 2 show an embodiment of the vacuum continuous processing apparatus of the present invention. FIG. 1 is a front view, FIG. 2 is a plan view of FIG. 1, and FIG. FIG. 4 is an enlarged view showing the main parts of the preliminary vacuum chamber, FIG. 4 is a view taken along the line 4-4 in FIG. 3, and FIG. 5 is a view corresponding to FIG. It is. 1... Vacuum processing chamber, 2, 3... Preliminary vacuum chamber, 1
9, 20... Seal member.
Claims (1)
の予備真空室内に相隣接して被処理物を搬送する
シールロールと、このシールロールを囲むケース
と、このケースと前記シールロールとの間をシー
ルするシール部材とを備える真空連続処理装置に
おいて、前記シール部材をケースに対して移動可
能に取付けることによつて、このシール部材の前
記シールロール方向への取付位置を調整可能に
し、前記シール部材のシールロールに対する押付
量を調整自在にすることを特徴とする真空連続処
理装置。 ２ 特許請求の範囲第１項記載の真空連続処理装
置において、前記シール部材をケースに対して移
動可能に取付けることによつて、このシール部材
の前記シールロール方向への取付位置を調整可能
にし、前記シール部材のシールロールに対する押
付量を調整自在にすると共に取外し自在に取付け
ることを特徴とする真空連続処理装置。[Scope of Claims] 1. A preliminary vacuum chamber disposed on the side of the vacuum processing chamber, a seal roll adjacent to the preliminary vacuum chamber for conveying the workpiece, a case surrounding the seal roll, and the case. In a vacuum continuous processing apparatus including a sealing member for sealing between the sealing roll and the sealing roll, the mounting position of the sealing member in the direction of the sealing roll can be controlled by mounting the sealing member movably with respect to the case. A vacuum continuous processing apparatus characterized in that the vacuum continuous processing apparatus is adjustable, and the amount of pressing of the seal member against the seal roll can be adjusted. 2. In the vacuum continuous processing apparatus according to claim 1, the seal member is movably attached to the case, so that the attachment position of the seal member in the direction of the seal roll can be adjusted; A continuous vacuum processing apparatus characterized in that the amount of pressure of the seal member against the seal roll is adjustable and the seal member is detachably attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787383A JPS60944A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787383A JPS60944A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60944A JPS60944A (en) | 1985-01-07 |
| JPH0455214B2 true JPH0455214B2 (en) | 1992-09-02 |
Family
ID=14470249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10787383A Granted JPS60944A (en) | 1983-06-17 | 1983-06-17 | Continuous vacuum treatment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60944A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
| JPS57195745A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Sealing device in continuous vacuum treatment apparatus |
-
1983
- 1983-06-17 JP JP10787383A patent/JPS60944A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5773025A (en) * | 1980-10-27 | 1982-05-07 | Shin Etsu Chem Co Ltd | Apparatus for continuous vacuum treatment |
| JPS57195745A (en) * | 1981-05-29 | 1982-12-01 | Shin Etsu Chem Co Ltd | Sealing device in continuous vacuum treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60944A (en) | 1985-01-07 |
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