JPS57195738A - Sealing device for vacuum treatment apparatus - Google Patents

Sealing device for vacuum treatment apparatus

Info

Publication number
JPS57195738A
JPS57195738A JP8089181A JP8089181A JPS57195738A JP S57195738 A JPS57195738 A JP S57195738A JP 8089181 A JP8089181 A JP 8089181A JP 8089181 A JP8089181 A JP 8089181A JP S57195738 A JPS57195738 A JP S57195738A
Authority
JP
Japan
Prior art keywords
roll
ripple
rolls
seal
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8089181A
Other languages
Japanese (ja)
Inventor
Kiyoshi Imada
Susumu Ueno
Hideaki Kamata
Masaya Tokai
Yoshitada Hata
Kenichi Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd, Hitachi Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP8089181A priority Critical patent/JPS57195738A/en
Publication of JPS57195738A publication Critical patent/JPS57195738A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0089—Sealing devices placed between articles and treatment installations during moulding or shaping, e.g. sealing off the entrance or exit of ovens or irradiation rooms, connections between rooms at different pressures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Rolls And Other Rotary Bodies (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To maintain good sealability of a preliminary vacuum chamber and ensure durability of seal rolls and ripple member, by mounting an elastic body around an annular recess of the seal roll. CONSTITUTION:The apparatus comprises a vacuum treating chamber 1 and preliminary vacuum chambers 2 an 3. In the preliminary chamber a plurality of sets of paired seal rolls 16, 17 are provided along the moving direction of a workpiece, and ripple members 19, 19 are abutted against a part of sealing rolls 16, 17 along its longitudinal direction. In this vacuum plasma treating apparatus for molded plastics, on the peripheral surface of an upper seal roll 16 an annular recess having a width corresponding to that of a workpiece F is provided and an elastic body 20 is buried in said recess, while leaving the both sides of the roller as bare metal. Consequently, a rubber member 20 of the upper seal roll 16 is pressed against the lower seal roll 17 through workpiece F to improve the sealability. Most of the pressing power between the upper seal roll 16 and the ripple member 19 is received by the metal surface of the roll, this improving durability of ripple member 19 as well as seal rolls 16, 17.
JP8089181A 1981-05-29 1981-05-29 Sealing device for vacuum treatment apparatus Pending JPS57195738A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8089181A JPS57195738A (en) 1981-05-29 1981-05-29 Sealing device for vacuum treatment apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8089181A JPS57195738A (en) 1981-05-29 1981-05-29 Sealing device for vacuum treatment apparatus

Publications (1)

Publication Number Publication Date
JPS57195738A true JPS57195738A (en) 1982-12-01

Family

ID=13730972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8089181A Pending JPS57195738A (en) 1981-05-29 1981-05-29 Sealing device for vacuum treatment apparatus

Country Status (1)

Country Link
JP (1) JPS57195738A (en)

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