JPS57194543A - Device for measuring characteristics of semiconductor device - Google Patents

Device for measuring characteristics of semiconductor device

Info

Publication number
JPS57194543A
JPS57194543A JP56079188A JP7918881A JPS57194543A JP S57194543 A JPS57194543 A JP S57194543A JP 56079188 A JP56079188 A JP 56079188A JP 7918881 A JP7918881 A JP 7918881A JP S57194543 A JPS57194543 A JP S57194543A
Authority
JP
Japan
Prior art keywords
misfet
voltage
section
measurement
gate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56079188A
Other languages
Japanese (ja)
Inventor
Shinji Shimizu
Takayoshi Fukushige
Jun Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP56079188A priority Critical patent/JPS57194543A/en
Publication of JPS57194543A publication Critical patent/JPS57194543A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

PURPOSE:To automate the measurement as well as to reduce the time required for the measurement of the titled characteristics by a method wherein an MISFET selective circuit section to be measured and a measuring circuit section, with which a measuring work is performed using the difference between the output voltage of a source common terminal and the gate voltage as a threshold voltage, are provided on a specific measuring device. CONSTITUTION:The arrangement section 3 of an MISFET row 2, an X-decoder section 4, a Y-decoder section 5, and address buffers 6 and 7 are provided on a semiconductor chip 1, an MISFET selective circuit to be measured, wherein FET with which a fixed voltage is stably applied to the gate will be selected, is constituted with decoders 4 and 5, a fixed voltage Vcc is applied to the gate of the selected MISFET, a fixed voltage VDD is applied to the drain, a circuit section to be used to measure the output voltage Vs from the common source terminal is provided, and the threshold voltage Vth is calculated as Vth=Vcc-Vs. Accordingly, the threshold voltage can be calculated in a short time, and the measurement can also be performed automatically.
JP56079188A 1981-05-27 1981-05-27 Device for measuring characteristics of semiconductor device Pending JPS57194543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56079188A JPS57194543A (en) 1981-05-27 1981-05-27 Device for measuring characteristics of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56079188A JPS57194543A (en) 1981-05-27 1981-05-27 Device for measuring characteristics of semiconductor device

Publications (1)

Publication Number Publication Date
JPS57194543A true JPS57194543A (en) 1982-11-30

Family

ID=13682994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56079188A Pending JPS57194543A (en) 1981-05-27 1981-05-27 Device for measuring characteristics of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57194543A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335902A (en) * 2007-09-07 2007-12-27 Advantest Corp System and method for manufacturing, device and method for management, and program
CN115078953A (en) * 2022-08-23 2022-09-20 合肥晶合集成电路股份有限公司 Electrical property measuring method of semiconductor device and electronic equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007335902A (en) * 2007-09-07 2007-12-27 Advantest Corp System and method for manufacturing, device and method for management, and program
CN115078953A (en) * 2022-08-23 2022-09-20 合肥晶合集成电路股份有限公司 Electrical property measuring method of semiconductor device and electronic equipment

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