JPS57193818A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS57193818A
JPS57193818A JP7897781A JP7897781A JPS57193818A JP S57193818 A JPS57193818 A JP S57193818A JP 7897781 A JP7897781 A JP 7897781A JP 7897781 A JP7897781 A JP 7897781A JP S57193818 A JPS57193818 A JP S57193818A
Authority
JP
Japan
Prior art keywords
lights
shift
extent
different wavelengths
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7897781A
Other languages
Japanese (ja)
Other versions
JPH0115082B2 (en
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7897781A priority Critical patent/JPS57193818A/en
Publication of JPS57193818A publication Critical patent/JPS57193818A/en
Publication of JPH0115082B2 publication Critical patent/JPH0115082B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To make positioing with high stabilizing accuracy at all times independently of the size of an object to be positioned, by vertically irradiating a plurality of coherent lights with different wavelengths to a diffraction grating and detecting diffracted light on the diffraction grating. CONSTITUTION:When lasers 21 and 22 with different wavelengths are irradiated on diffraction gratings 14 and 18, coherent lights 23 and 24 having the intensity corresponding to the extent of shift of the diffraction gratings 14 and 18 are detected at photodetectors 27a, 28a and 27b, 28b located respectively toward (+n) and (-n) order direction and the lights are converted into photodetection signals. Each photodetection signal are given to operational amplifiers 31 and 32 to obtain a difference between the lights with equal wavelength. Each difference signal is square-averaged at an operation circuit 33. The output represents the extent of shift of positioning for an object to be positioned.
JP7897781A 1981-05-25 1981-05-25 Positioning device Granted JPS57193818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7897781A JPS57193818A (en) 1981-05-25 1981-05-25 Positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7897781A JPS57193818A (en) 1981-05-25 1981-05-25 Positioning device

Publications (2)

Publication Number Publication Date
JPS57193818A true JPS57193818A (en) 1982-11-29
JPH0115082B2 JPH0115082B2 (en) 1989-03-15

Family

ID=13676948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7897781A Granted JPS57193818A (en) 1981-05-25 1981-05-25 Positioning device

Country Status (1)

Country Link
JP (1) JPS57193818A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812726A (en) * 1986-01-16 1989-03-14 Mitsubishi Denki Kabushiki Kaisha Servo circuit positioning actuator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812726A (en) * 1986-01-16 1989-03-14 Mitsubishi Denki Kabushiki Kaisha Servo circuit positioning actuator

Also Published As

Publication number Publication date
JPH0115082B2 (en) 1989-03-15

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