JPS57192266A - Plasma surface treating apparatus - Google Patents
Plasma surface treating apparatusInfo
- Publication number
- JPS57192266A JPS57192266A JP7421681A JP7421681A JPS57192266A JP S57192266 A JPS57192266 A JP S57192266A JP 7421681 A JP7421681 A JP 7421681A JP 7421681 A JP7421681 A JP 7421681A JP S57192266 A JPS57192266 A JP S57192266A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- treating apparatus
- discharge tube
- section
- generating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7421681A JPS57192266A (en) | 1981-05-19 | 1981-05-19 | Plasma surface treating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7421681A JPS57192266A (en) | 1981-05-19 | 1981-05-19 | Plasma surface treating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57192266A true JPS57192266A (en) | 1982-11-26 |
Family
ID=13540771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7421681A Pending JPS57192266A (en) | 1981-05-19 | 1981-05-19 | Plasma surface treating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57192266A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60169139A (ja) * | 1984-02-13 | 1985-09-02 | Canon Inc | 気相法装置 |
JPS63217628A (ja) * | 1987-03-06 | 1988-09-09 | Hitachi Ltd | プラズマ処理装置 |
US20120152938A1 (en) * | 2010-12-21 | 2012-06-21 | Whirlpool Corporation | Control of microwave source efficiency in a microwave heating apparatus |
CZ305482B6 (cs) * | 2015-04-20 | 2015-10-21 | Fyzikální ústav AV ČR, v.v.i. | Hybridní plazmová tryska s povrchovou vlnou pro buzení vysoce reaktivních výbojů |
-
1981
- 1981-05-19 JP JP7421681A patent/JPS57192266A/ja active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60169139A (ja) * | 1984-02-13 | 1985-09-02 | Canon Inc | 気相法装置 |
JPS63217628A (ja) * | 1987-03-06 | 1988-09-09 | Hitachi Ltd | プラズマ処理装置 |
US20120152938A1 (en) * | 2010-12-21 | 2012-06-21 | Whirlpool Corporation | Control of microwave source efficiency in a microwave heating apparatus |
US10820383B2 (en) | 2010-12-21 | 2020-10-27 | Whirlpool Corporation | Control of microwave source efficiency in a microwave heating apparatus |
US11765799B2 (en) | 2010-12-21 | 2023-09-19 | Whirlpool Corporation | Control of microwave source efficiency in a microwave heating apparatus |
CZ305482B6 (cs) * | 2015-04-20 | 2015-10-21 | Fyzikální ústav AV ČR, v.v.i. | Hybridní plazmová tryska s povrchovou vlnou pro buzení vysoce reaktivních výbojů |
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