JPS57187604A - Measurement device of profile - Google Patents

Measurement device of profile

Info

Publication number
JPS57187604A
JPS57187604A JP7245881A JP7245881A JPS57187604A JP S57187604 A JPS57187604 A JP S57187604A JP 7245881 A JP7245881 A JP 7245881A JP 7245881 A JP7245881 A JP 7245881A JP S57187604 A JPS57187604 A JP S57187604A
Authority
JP
Japan
Prior art keywords
converter
calculated
average
pattern
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7245881A
Other languages
English (en)
Other versions
JPS6244203B2 (ja
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7245881A priority Critical patent/JPS57187604A/ja
Publication of JPS57187604A publication Critical patent/JPS57187604A/ja
Publication of JPS6244203B2 publication Critical patent/JPS6244203B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP7245881A 1981-05-14 1981-05-14 Measurement device of profile Granted JPS57187604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7245881A JPS57187604A (en) 1981-05-14 1981-05-14 Measurement device of profile

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7245881A JPS57187604A (en) 1981-05-14 1981-05-14 Measurement device of profile

Publications (2)

Publication Number Publication Date
JPS57187604A true JPS57187604A (en) 1982-11-18
JPS6244203B2 JPS6244203B2 (ja) 1987-09-18

Family

ID=13489875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7245881A Granted JPS57187604A (en) 1981-05-14 1981-05-14 Measurement device of profile

Country Status (1)

Country Link
JP (1) JPS57187604A (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59126204A (ja) * 1982-12-29 1984-07-20 Fujitsu Ltd 光デイスク用溝付き円板の測定装置
JPS61290308A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd エツチング深さ測定装置
US4835756A (en) * 1986-03-31 1989-05-30 Hitachi, Ltd. Optical memory apparatus using an optical disc having guide-grooves of V-shape and predetermined optical depth and access method therefor
US5243406A (en) * 1990-07-04 1993-09-07 Fujitsu Limited Method and apparatus for measuring three-dimensional configuration of wire-shaped object in a short time
JPH0886623A (ja) * 1994-09-19 1996-04-02 Nec Corp 溝形状測定装置
JP2005195361A (ja) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp 走査電子顕微鏡を用いたライン・アンド・スペースパターンの測定方法
JP2005283139A (ja) * 2004-03-26 2005-10-13 Hitachi High-Technologies Corp パターン測定方法
WO2008069078A1 (ja) 2006-11-30 2008-06-12 Mitsubishi Kagaku Media Co., Ltd. 情報記録媒体及び原盤露光装置
US7859659B2 (en) 1998-03-06 2010-12-28 Kla-Tencor Corporation Spectroscopic scatterometer system
CN106197312A (zh) * 2016-07-06 2016-12-07 江苏鑫晨光热技术有限公司 一种定日镜面形快速检测系统及其方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0132442B2 (ja) * 1982-12-29 1989-06-30 Fujitsu Ltd
JPS59126204A (ja) * 1982-12-29 1984-07-20 Fujitsu Ltd 光デイスク用溝付き円板の測定装置
JPS61290308A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd エツチング深さ測定装置
US4835756A (en) * 1986-03-31 1989-05-30 Hitachi, Ltd. Optical memory apparatus using an optical disc having guide-grooves of V-shape and predetermined optical depth and access method therefor
US5243406A (en) * 1990-07-04 1993-09-07 Fujitsu Limited Method and apparatus for measuring three-dimensional configuration of wire-shaped object in a short time
JPH0886623A (ja) * 1994-09-19 1996-04-02 Nec Corp 溝形状測定装置
US7859659B2 (en) 1998-03-06 2010-12-28 Kla-Tencor Corporation Spectroscopic scatterometer system
US7898661B2 (en) 1998-03-06 2011-03-01 Kla-Tencor Corporation Spectroscopic scatterometer system
JP2005195361A (ja) * 2003-12-26 2005-07-21 Hitachi High-Technologies Corp 走査電子顕微鏡を用いたライン・アンド・スペースパターンの測定方法
US7433542B2 (en) 2003-12-26 2008-10-07 Hitachi High-Technologies Corporation Method for measuring line and space pattern using scanning electron microscope
JP2005283139A (ja) * 2004-03-26 2005-10-13 Hitachi High-Technologies Corp パターン測定方法
WO2008069078A1 (ja) 2006-11-30 2008-06-12 Mitsubishi Kagaku Media Co., Ltd. 情報記録媒体及び原盤露光装置
CN106197312A (zh) * 2016-07-06 2016-12-07 江苏鑫晨光热技术有限公司 一种定日镜面形快速检测系统及其方法

Also Published As

Publication number Publication date
JPS6244203B2 (ja) 1987-09-18

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