JPS57186136A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS57186136A
JPS57186136A JP7082981A JP7082981A JPS57186136A JP S57186136 A JPS57186136 A JP S57186136A JP 7082981 A JP7082981 A JP 7082981A JP 7082981 A JP7082981 A JP 7082981A JP S57186136 A JPS57186136 A JP S57186136A
Authority
JP
Japan
Prior art keywords
post
temperature
thermal expansion
glass
connection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7082981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349174B2 (enrdf_load_html_response
Inventor
Masatoshi Tsuchiya
Hiroshi Soeno
Tomomasa Yoshida
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7082981A priority Critical patent/JPS57186136A/ja
Publication of JPS57186136A publication Critical patent/JPS57186136A/ja
Publication of JPS6349174B2 publication Critical patent/JPS6349174B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP7082981A 1981-05-13 1981-05-13 Semiconductor pressure transducer Granted JPS57186136A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7082981A JPS57186136A (en) 1981-05-13 1981-05-13 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7082981A JPS57186136A (en) 1981-05-13 1981-05-13 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS57186136A true JPS57186136A (en) 1982-11-16
JPS6349174B2 JPS6349174B2 (enrdf_load_html_response) 1988-10-03

Family

ID=13442852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7082981A Granted JPS57186136A (en) 1981-05-13 1981-05-13 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS57186136A (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176639A (ja) * 1983-03-28 1984-10-06 Toshiba Corp 半導体圧力変換器
JPH0483733A (ja) * 1990-07-23 1992-03-17 Hoya Corp シリコン台座用ガラス、シリコン基材型センサー、及びシリコン基材型圧力センサー
JPH11153501A (ja) * 1997-11-20 1999-06-08 Yamatake Corp 半導体圧力変換器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59176639A (ja) * 1983-03-28 1984-10-06 Toshiba Corp 半導体圧力変換器
JPH0483733A (ja) * 1990-07-23 1992-03-17 Hoya Corp シリコン台座用ガラス、シリコン基材型センサー、及びシリコン基材型圧力センサー
JPH11153501A (ja) * 1997-11-20 1999-06-08 Yamatake Corp 半導体圧力変換器

Also Published As

Publication number Publication date
JPS6349174B2 (enrdf_load_html_response) 1988-10-03

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